# US 7,410,908 B2 · Manufacturing method for a semiconductor device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,410,908 B2 - Document ID: US7410908B2 - Status: Granted - Kind: B2 - Application number: 11/445,398 - Filed: 2006-06-01 - Published: 2006-12-28 - Granted: 2008-08-12 - Earliest claimed: 2005-06-24 - Assignees: Seiko Epson Corporation - Inventors: Kazumi Hara - Web page: https://patentgrep.com/patent/US7410908B2 ## CPC - H10P 54/00: Cutting or separating of wafers, substrates or parts of devices - H10P 50/642: {Chemical etching} - H10P 72/74: {using temporarily an auxiliary support} - H10P 72/7448: {the bond interface between the auxiliary support and the wafer comprising two or more, e.g. multilayer adhesive or adhesive and release layer} - H10P 72/7412: {the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support} - H10P 72/7416: {used during dicing or grinding} - H10P 72/7422: {used to protect an active side of a device or wafer} - H10P 72/744: {Details of chemical or physical process used for separating the auxiliary support from a device or a wafer} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A manufacturing method for a semiconductor device, includes: preparing a semiconductor wafer having an active surface, a side surface, a rear surface on the side opposite the active surface, and a plurality of semiconductor elements formed on the active surface; forming the side surface of the semiconductor wafer so that an angle defined by at least a portion of the side surface of the semiconductor wafer and the rear surface of the semiconductor wafer becomes an acute angle; and performing a spin etching in which etching liquid is dripped onto the rear surface of the semiconductor wafer while blowing air toward the active surface of the semiconductor wafer and toward the side surface of the semiconductor wafer and while rotating the semiconductor wafer. ## Claims ### Claim 1 A manufacturing method for a semiconductor device, comprising: preparing a semiconductor wafer having an active surface, a side surface, a rear surface on the side opposite the active surface, and a plurality of semiconductor elements formed on the active surface; forming the side surface of the semiconductor wafer so that an angle defined by the entire side surface of the semiconductor wafer and the rear surface of the semiconductor wafer becomes an acute angle; and performing a spin etching in which etching liquid is dripped onto the rear surface of the semiconductor wafer while blowing air from below toward the active surface of the semiconductor wafer and toward the side surface of the semiconductor wafer and while rotating the semiconductor wafer. ### Claim 2 A manufacturing method for a semiconductor device, comprising: preparing a semiconductor wafer having an active surface, a side surface, a rear surface on the side opposite the active surface, and a plurality of semiconductor elements formed on the active surface; preparing a supporting substrate supporting the semiconductor wafer and having a facing surface facing the active surface of the semiconductor wafer, a side surface, and a rear surface on the opposite side of the facing surface; connecting the semiconductor wafer and the supporting substrate via an adhesive while facing the active surface of the semiconductor wafer and the facing surface of the supporting substrate; forming the side surface of the semiconductor wafer and the side surface of the supporting substrate so that at least one among a first angle defined by at least a portion of the side surface of the semiconductor wafer and the rear surface of the semiconductor wafer, and a second angle defined by at least a portion of the side surface of the supporting substrate and the facing surface of the supporting substrate becomes an acute angle or a right angle; and performing a spin etching in which etching liquid is dripped onto the rear surface of the semiconductor wafer while blowing air toward the rear surface of the supporting substrate and toward the side surface of the supporting substrate and while rotating the semiconductor wafer. ### Claim 3 (depends on 2) The manufacturing method for a semiconductor device according to claim 2, wherein the first angle and the second angle are defined such that the side surface of the semiconductor wafer and the side surface of the supporting substrate are positioned in the same plane. ### Claim 4 A manufacturing method for a semiconductor device, comprising: preparing a semiconductor wafer having an active surface, a side surface, a rear surface on the side opposite the active surface, and a plurality of semiconductor elements formed on the active surface; preparing a supporting substrate supporting the semiconductor wafer and having a facing surface facing the active surface of the semiconductor wafer and a side surface; connecting the semiconductor wafer and the supporting substrate via an adhesive while facing the active surface of the semiconductor wafer and the facing surface of the supporting substrate; forming, on at least one among the side surface of the semiconductor wafer and the side surface of the supporting substrate, a protruding portion having a first surface extending in the outward direction of the semiconductor wafer from a portion of the side surface of the semiconductor wafer, and a second surface extending from a portion of the side surface of the supporting substrate to the tip portion of the first surface; forming the side surface of the semiconductor wafer so that an angle defined by the first surface and the second surface of the protruding portion becomes an acute angle or a right angle; and performing a spin etching in which etching liquid is dripped onto the rear surface of the semiconductor wafer while blowing air from below the supporting substrate toward the supporting substrate and while rotating the semiconductor wafer. ### Claim 5 (depends on 4) The manufacturing method for a semiconductor device according to claim 4, wherein the first surface and the rear surface of the semiconductor wafer are formed such that the first surface and the rear surface of the semiconductor wafer are positioned in the same plane. ### Claim 6 (depends on 4) The manufacturing method for a semiconductor device according to claim 4, wherein the material of the protruding portion includes a resin. ### Claim 7 (depends on 4) The manufacturing method for a semiconductor device according to claim 4, wherein the protruding portion is formed along the outer perimeter of at least one among the side surface of the semiconductor wafer and the side surface of the supporting substrate. ### Claim 8 A manufacturing method for a semiconductor device, comprising: preparing a semiconductor wafer having an active surface, a side surface, a rear surface on the side opposite the active surface, and a plurality of semiconductor elements formed on the active surface; preparing a supporting substrate supporting the semiconductor wafer and having a facing surface facing the active surface of the semiconductor wafer and a side surface; arranging an adhesive on at least one among the active surface of the semiconductor wafer and the facing surface of the supporting substrate; arranging the semiconductor wafer on the lower side of the supporting substrate; connecting the semiconductor wafer and the supporting substrate via the adhesive; performing a back-grinding in which the adhesive leaking from between the semiconductor wafer and the supporting substrate and the rear surface of the semiconductor wafer are ground, wherein a protruding portion made of the leaked adhesive is formed on at least one among the side surface of the semiconductor wafer and the side surface of the supporting substrate; performing a spin etching in which etching liquid is dripped onto the rear surface of the semiconductor wafer while blowing air from below the supporting substrate toward the supporting substrate and while rotating the semiconductor wafer; and dividing the semiconductor wafer and the supporting substrate after the performing of the spin etching. ### Claim 9 (depends on 8) The manufacturing method for a semiconductor device according to claim 8, further comprising: arranging a resin on at least one among the side surface of the semiconductor wafer and the side surface of the supporting substrate after connecting the semiconductor wafer and the supporting substrate. ### Claim 10 A manufacturing method for a semiconductor device, comprising: preparing a semiconductor wafer having an active surface, a side surface, a rear surface on the side opposite the active surface, and a plurality of semiconductor elements formed on the active surface; preparing a supporting substrate supporting the semiconductor wafer and having a facing surface facing the active surface of the semiconductor wafer and a side surface; forming a laminated structure by facing the active surface of the semiconductor wafer and the facing surface of the supporting substrate, and by connecting the semiconductor wafer and the supporting substrate via an adhesive; performing a back-grinding in which the rear surface of the semiconductor wafer is ground; arranging the laminated structure on a table while facing the rear surface of the semiconductor wafer to the table; forming a protruding portion by arranging a resin on at least one among the side surface of the semiconductor wafer and the side surface of the supporting substrate; dividing the laminated structure from the table; performing a spin etching in which etching liquid is dripped onto the rear surface of the semiconductor wafer while blowing air from below the supporting substrate toward the supporting substrate and while rotating the semiconductor wafer; and dividing the semiconductor wafer and the supporting substrate after the performing of the spin etching. ### Claim 11 (depends on 10) The manufacturing method for a semiconductor device according to claim 10, wherein an angle defined by a surface of the table on which the laminated structure is arranged and a side surface of the protruding portion, is an acute angle or a right angle.