# US 7,410,894 B2 · Post last wiring level inductor using patterned plate process

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- Number: US 7,410,894 B2
- Document ID: US7410894B2
- Status: Granted
- Kind: B2
- Application number: 11/161,217
- Filed: 2005-07-27
- Published: 2007-02-01
- Granted: 2008-08-12
- Earliest claimed: 2005-07-27
- Assignees: International Business Machines Corporation
- Inventors: Anil K. Chinthakindi; Douglas D. Coolbaugh; John E. Florkey; Jeffrey P. Gambino; Zhong-Xiang He; Anthony K. Stamper; Kunal Vaed
- Web page: https://patentgrep.com/patent/US7410894B2

## CPC

- H10W 20/063: {by forming conductive members before forming protective insulating material}
- H10D 1/20: Inductors
- H10W 20/054: {by selectively removing parts thereof (H10W20/034 takes precedence)}
- H10W 20/057: {by selectively depositing, e.g. by using selective CVD or plating}
- H10W 20/077: {on sidewalls or on top surfaces of conductors (H10W20/076 takes precedence)}
- H10W 20/081: {by forming openings in the dielectric parts}
- H10W 20/082: {the openings being tapered via holes}
- H10W 20/084: {for dual-damascene structures}
- H10W 20/085: {involving intermediate temporary filling with material}
- H10W 20/425: {Barrier, adhesion or liner layers}
- H10W 20/497: {Inductive arrangements or effects of, or between, wiring layers}
- H10W 20/039: {also covering sidewalls of the conductive structures}
- H10W 20/0888: {wherein via-level dielectrics are compositionally different than trench-level dielectrics}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A method of forming a semiconductor structure, and the semiconductor structure so formed, wherein a transmission line, such as an inductor, is formed on a planar level above the surface of a last metal wiring level.

## Claims

### Claim 1

A method of forming a semiconductor substrate, comprising:
providing a substrate having at least one metal wiring level within the substrate;
depositing a first insulative layer on a surface of the substrate;
forming a wire bond pad within the first insulative layer;
depositing a second insulative layer on the first insulative layer and the wire bond pad; and
forming an inductor within the second insulative layer using a patterned plate process, wherein the inductor is formed substantially co-planar with at least a portion of the wire bond pad, wherein forming the inductor further comprises:
depositing a liner on the surface of the substrate and on a surface within an at least one opening within the second insulative layer;
depositing a seed layer on a surface of the liner;
removing a portion of the seed layer from the surface of the substrate, leaving the seed layer within the at least one opening within the second insulative layer;
depositing a conductive material within the at least one opening within the second insulative layer, such that the conductive material extends above the surface of the substrate; and
planarizing the surface of the substrate to remove excess conductive material extending above the surface of the substrate.

### Claim 2 (depends on 1)

The method of claim 1, following planarizing the surface of the substrate, further comprising:
removing at least a portion of the second insulative layer;
depositing a dielectric layer on the surface of the substrate; and
forming an opening within the dielectric layer down to the wire bond pad.

### Claim 3 (depends on 1)

The method of claim 1, further comprising:
before said forming the wire bond pad, depositing a first dielectric layer over the surface of the substrate such that the first dielectric layer is disposed between the substrate and the first insulative layer and is in direct mechanical contact with the substrate and the first insulative layer; and
forming an opening within the first dielectric layer and the first insulative layer down to the at least one metal wiring level within the substrate.

### Claim 4 (depends on 3)

The method of claim 3, wherein said forming the wire bond pad comprises forming the wire bond pad in and above the opening such that portions of an exterior surface of the wire bond pad are disposed in the second insulative layer.

### Claim 5 (depends on 4)

The method of claim 4, wherein the dielectric layer prevents copper within a wire in the at least one metal wiring level from diffusing into the first insulative layer.

### Claim 6 (depends on 4)

The method of claim 4, wherein the method further comprises:
after said forming the inductor, removing the second insulative layer such that the inductor remains after said removing the second insulative layer has been performed;
after said removing the second insulative layer, forming a second dielectric layer on and in direct mechanical contact with the first insulative layer such that the second dielectric layer completely covers and is in direct mechanical contact with both the inductor and the exterior surface of the wire bond pad, wherein said portions of the exterior surface of the wire bond pad are disposed in the second dielectric layer.

### Claim 7 (depends on 6)

The method of claim 6, wherein the method further comprises removing a first portion of the second dielectric layer to uncover a fractional portion of the exterior surface of the wire bond pad such that both the inductor and a remaining portion of the exterior surface of the wire bond pad remain completely covered by a remaining portion of the second dielectric layer.

### Claim 8 (depends on 7)

The method of claim 7,
wherein a first portion of the exterior surface of the wire bond pad is disposed between a second portion of the exterior surface of the wire bond pad and a third portion of the exterior surface of the wire bond pad;
wherein the fractional portion of the exterior surface of the wire bond pad comprises the first portion of the exterior surface of the wire bond pad, a first part of the second portion of the exterior surface of the wire bond pad, and a first part of the third portion of the exterior surface of the wire bond pad;
wherein the remaining portion of the exterior surface of the wire bond pad comprises a second part of the second portion of the exterior surface of the wire bond pad and a second part of the third portion of the exterior surface of the wire bond pad.