# US 7,408,289 B2 · Piezoelectric actuator, and apparatus and method for actuating the same

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- Number: US 7,408,289 B2
- Document ID: US7408289B2
- Status: Granted
- Kind: B2
- Application number: 11/406,181
- Filed: 2006-04-17
- Published: 2007-03-29
- Granted: 2008-08-05
- Earliest claimed: 2005-09-27
- Assignees: Samsung Techwin Co., Ltd.
- Inventors: Seung-bong Lee
- Web page: https://patentgrep.com/patent/US7408289B2

## CPC

- H02N 2/065: {Large signal circuits, e.g. final stages}
- H02N 2/08: using travelling waves {, i.e. Rayleigh surface waves}
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

## Abstract

A linear actuator using a metal beam-type piezoelectric material, and an apparatus and a method for actuating the same. The piezoelectric actuator includes: a moving member having a predetermined length and moving in a forward or a backward direction; and a piezoelectric portion contacting the moving member and moving the moving member linearly using a vibration generated when a piezoelectric element contracts or expands in response to an electrical signal.

## Claims

### Claim 1

A piezoelectric actuator comprising:
a moving member having a predetermined length; and
a piezoelectric portion contacting the moving member, the piezoelectric portion comprising:
a piezoelectric layer comprising a plurality of regions;
a first electrode layer divided into the same number of regions as the piezoelectric layer, disposed on a first side the piezoelectric layer, and applying electrical signals to the regions of the piezoelectric layer;
a second electrode layer divided into the same number of regions as the piezoelectric layer, disposed on a second side of the piezoelectric layer that is opposite the first side, and applying electrical signals to the regions of the piezoelectric layer; and
a metal layer transmitting the vibration of the piezoelectric layer to the moving member; wherein the piezoelectric layer generates a contraction vibration or an expanding vibration in response to an electrical signal to move the moving member linearly in response to the contraction vibration or the expanding vibration.

### Claim 2 (depends on 1)

The piezoelectric actuator of claim 1, wherein the moving member moves in a forward or a backward direction.

### Claim 3 (depends on 2)

The piezoelectric actuator of claim 2, further comprising a cover separated from the moving member, surrounding a portion of the moving member, and including the piezoelectric portion.

### Claim 4 (depends on 2)

The piezoelectric actuator of claim 2, wherein the piezoelectric portion contacts at least one of the upper portion and the lower portion of the moving member and generates a vertical vibration.

### Claim 5 (depends on 2)

The piezoelectric actuator of claim 2, wherein the piezoelectric portion contacts at least one of a first side and a second side of the moving member and generates a horizontal vibration.

### Claim 6 (depends on 1)

The piezoelectric actuator of claim 1, wherein the piezoelectric layer and the first and second electrode layers are divided into at least eight regions.

### Claim 7 (depends on 3)

The piezoelectric actuator of claim 3, wherein the piezoelectric layer and the first and second electrode layers are divided into at least eight regions.

### Claim 8 (depends on 4)

The piezoelectric actuator of claim 4, wherein the piezoelectric layer and the first and second electrode layers are divided into at least eight regions.

### Claim 9 (depends on 5)

The piezoelectric actuator of claim 5, wherein the piezoelectric layer and the first and second electrode layers are divided into at least eight regions.

### Claim 10 (depends on 1)

The piezoelectric actuator of claim 1, wherein the moving speed of the moving member varies according to levels of the electrical signals.

### Claim 11 (depends on 3)

The piezoelectric actuator of claim 3, wherein the moving speed of the moving member varies according to levels of the electrical signals.

### Claim 12 (depends on 4)

The piezoelectric actuator of claim 4, wherein the moving speed of the moving member vanes according to levels of the electrical signals.

### Claim 13 (depends on 5)

The piezoelectric actuator of claim 5, wherein the moving speed of the moving member varies according to levels of the electrical signals.

### Claim 14 (depends on 1)

The piezoelectric actuator of claim 1, wherein the phase of the electric signal applied a first one of the plurality of regions of the piezoelectric layer is opposite to the phase of the electric signal applied to a second one of the plurality of regions of the piezoelectric layer.

### Claim 15 (depends on 1)

The piezoelectric actuator of claim 1, wherein phases of the electric signals applied to a first/fifth region and a second/sixth region of the piezoelectric layer are opposite to phases of the electrical signals applied to a third/seventh region and a fourth/eighth region of the piezoelectric layer.

### Claim 16 (depends on 3)

The piezoelectric actuator of claim 3, wherein the phase of the electric signal applied a first one of the plurality of regions of the piezoelectric layer is opposite to the phase of the electric signal applied to a second one of the plurality of regions of the piezoelectric layer.

### Claim 17 (depends on 3)

The piezoelectric actuator of claim 3, wherein phases of the electric signals applied to a first/fifth region and a second/sixth region of the piezoelectric layer are opposite to phases of the electrical signals applied to a third/seventh region and a fourth/eighth region of the piezoelectric layer.

### Claim 18 (depends on 4)

The piezoelectric actuator of claim 4, wherein the phase of the electric signal applied a first one of the plurality of regions of the piezoelectric layer is opposite to the phase of the electric signal applied to a second one of the plurality of regions of the piezoelectric layer.

### Claim 19 (depends on 4)

The piezoelectric actuator of claim 4, wherein phases of the electric signals applied to a first/fifth region and a second/sixth region of the piezoelectric layer are opposite to phases of the electrical signals applied to a third/seventh region and a fourth/eighth region of the piezoelectric layer.

### Claim 20 (depends on 5)

The piezoelectric actuator of claim 5, wherein the phase of the electric signal applied a first one of the plurality of regions of the piezoelectric layer is opposite to the phase of the electric signal applied to a second one of the plurality of regions of the piezoelectric layer.

### Claim 21 (depends on 5)

The piezoelectric actuator of claim 5, wherein phases of the electric signals applied to a first/fifth region and a second/sixth region of the piezoelectric layer are opposite to phases of the electrical signals applied to a third/seventh region and a fourth/eighth region of the piezoelectric layer.

### Claim 22 (depends on 15)

The piezoelectric actuator of claim 15, wherein, if the electrical signals are applied to the first/fifth region and the third/seventh region of the piezoelectric layer, the moving member moves in a forward direction.

### Claim 23 (depends on 17)

The piezoelectric actuator of claim 17, wherein, if the electrical signals are applied to the first/fifth region and the third/seventh region of the piezoelectric layer, the moving member moves in a forward direction.

### Claim 24 (depends on 19)

The piezoelectric actuator of claim 19, wherein, if the electrical signals are applied to the first/fifth region and the third/seventh region of the piezoelectric layer, the moving member moves in a forward direction.

### Claim 25 (depends on 21)

The piezoelectric actuator of claim 21, wherein, if the electrical signals are applied to the first/fifth region and the third/seventh region of the piezoelectric layer, the moving member moves in a forward direction.

### Claim 26 (depends on 22)

The piezoelectric actuator of claim 22, wherein, if the electrical signals are applied to the second/sixth region and the fourth/eighth region of the piezoelectric layer, the moving member moves in a backward direction.

### Claim 27 (depends on 23)

The piezoelectric actuator of claim 23, wherein, if the electrical signals are applied to the second/sixth region and the fourth/eighth region of the piezoelectric layer, the moving member moves in a backward direction.

### Claim 28 (depends on 24)

The piezoelectric actuator of claim 24, wherein, if the electrical signals are applied to the second/sixth region and the fourth/eighth region of the piezoelectric layer, the moving member moves in a backward direction.

### Claim 29 (depends on 25)

The piezoelectric actuator of claim 25, wherein, if the electrical signals are applied to the second/sixth region and the fourth/eighth region of the piezoelectric layer, the moving member moves in a backward direction.

### Claim 30

An apparatus for actuating a piezoelectric actuator, comprising:
a piezoelectric actuator, wherein the piezoelectric actuator comprises:
a moving member having a predetermined length and moving in a forward or a backward direction; and
a piezoelectric portion contacting the moving member, wherein the piezoelectric portion moves the moving member linearly using a vibration generated when the piezoelectric portion contracts or expands in response to an electrical signal; and
an actuating unit comprising:
a controlling unit outputting a moving direction, a moving speed, and a motion amount of the piezoelectric actuator in response to a received command;
a switching unit changing the moving direction, forward or backward, of the piezoelectric actuator in response to a moving direction signal of the controlling unit;
an oscillation unit generating the moving speed signal of the controlling unit as a sinusoidal wave having a predetermined amplitude; and
a synthesizing unit synthesizing the switched direction signal and the sinusoidal wave to output the synthesized signal to the piezoelectric actuator and apply the sinusoidal wave to a first/fifth region and a third/seventh region of the piezoelectric element to move the piezoelectric actuator in a forward direction at the moving speed.

### Claim 31 (depends on 30)

The apparatus of claim 30, wherein the piezoelectric portion of the piezoelectric actuator contacts at least on of the upper portion and the lower portion of the moving member and generates a vertical vibration in response to the electrical signals.

### Claim 32 (depends on 30)

The apparatus of claim 30, wherein the piezoelectric portion of the piezoelectric actuator contacts at least one of a first side and a second side of the moving member and generates a horizontal vibration in response to the electrical signals.

### Claim 33 (depends on 30)

The apparatus of claim 30, wherein the piezoelectric portion is divided into at least eight regions.

### Claim 34 (depends on 30)

The apparatus of claim 30 wherein the synthesizing unit applies the sinusoidal wave to a second/sixth region and a fourth/eighth region of the piezoelectric portion to move the piezoelectric actuator in a backward direction at the moving speed.

### Claim 35

A method of actuating a piezoelectric actuator including a moving member having a predetermined length and moving in a forward or a backward direction, and a piezoelectric portion contacting the moving member, divided into at least eight regions, and moving the moving member linearly using a vibration generated when the piezoelectric portion contracts or expands in response to an electrical signal, the method comprising:
receiving a signal for controlling a motion of the piezoelectric actuator to generate a sinusoidal wave having a predetermined amplitude; and
applying the sinusoidal wave to arbitrary regions of the piezoelectric portion to move the piezoelectric actuator in a forward or backward direction,
wherein, if the sinusoidal wave is applied to a first/fifth region and a third/seventh region of the piezoelectric portion, the moving member moves in a forward direction.

### Claim 36 (depends on 35)

The method of claim 35, wherein, if the sinusoidal wave is applied to a second/sixth region and a fourth/eighth region of the piezoelectric portion, the moving member moves in a backward direction.
