# US 7,408,177 B2 · Scintillator panel and radiation image sensor

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- Number: US 7,408,177 B2
- Document ID: US7408177B2
- Status: Granted
- Kind: B2
- Application number: 11/366,492
- Filed: 2006-03-03
- Published: 2006-11-23
- Granted: 2008-08-05
- Earliest claimed: 1998-06-18
- Assignees: Hamamatsu Photonics K.K.
- Inventors: Takuya Homme; Toshio Takabayashi; Hiroto Sato; Takaharu Suzuki; Yoshio Natsume
- Web page: https://patentgrep.com/patent/US7408177B2

## CPC

- G01T 1/202: the detector being a crystal
- G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00)

## Abstract

An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

## Claims

### Claim 1

A panel for detection of radiation ray, comprising:
a support substrate on which a plurality of columnar crystals made of alkali-halide system material are formed and each of the columnar crystals has a needle shape;
said support substrate comprising;
a substrate; and
a first organic film substantially enveloping said substrate; and
said panel further comprising a second organic film substantially enveloping said columnar crystals formed on the support substrate and the support substrate.

### Claim 2 (depends on 1)

The panel according to claim 1, wherein substrate comprises carbon or aluminum as a main component.

### Claim 3 (depends on 1)

The panel according to claim 1, wherein the material of the first organic film is the same as that of the second organic film.

### Claim 4 (depends on 1)

The panel according to claim 1, wherein either one of the first and second organic films is made of polyparaxylylene system material.

### Claim 5 (depends on 4)

The panel according to claim 4, wherein the polyparaxylylene system material comprises polyparaxypolymonochloroparaxylylene, polydichloroparaxylylene, polytetrachloroparaxylylene, polyfluoroparaxylylene, polydimethylparaxylylene, and polydiethylparaxylylene.

### Claim 6 (depends on 1)

The panel according to claim 1, further comprising a reflective film made of metal between the first organic film and the plurality of columnar crystals.

### Claim 7 (depends on 1)

The panel according to claim 1, wherein the support substrate further comprises a reflection film between the support substrate and the first organic film.