# US 7,408,170 B2 · Ultraviolet detector > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,408,170 B2 - Document ID: US7408170B2 - Status: Granted - Kind: B2 - Application number: 11/308,373 - Filed: 2006-03-20 - Published: 2007-07-26 - Granted: 2008-08-05 - Earliest claimed: 2006-01-24 - Assignees: Industrial Technology Research Institute - Inventors: Cha-Hsin Lin; Lurng-Shehng Lee - Web page: https://patentgrep.com/patent/US7408170B2 ## CPC - G01J 1/429: {applied to measurement of ultraviolet light (using counting tubes G01T)} - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) ## Abstract An ultraviolet detector (UV-detector) including a substrate, a first electrode, and a second electrode is provided. The UV-detector substrate comprises an active region for absorbing ultraviolet light and generating charges. The first electrode is electrically connected to the active region and has a plurality of first tips. Additionally, the second electrode is electrically connected to the active region and has a plurality of second tips. The second electrode is electrically insulated from the first electrode. The first and second tips facilitate the conduction of the charge generated by the photoelectric effect, and the sensitivity of the UV-detector is thus enhanced. ## Claims ### Claim 1 An ultraviolet detector, comprising: a substrate having an active region for absorbing an ultraviolet light and generating charges; a first electrode electrically connected to the active region of the substrate and embedded in the substrate, wherein the first electrode has a plurality of first tips; and a second electrode electrically connected to the active region of the substrate and embedded in the substrate, wherein the second electrode has a plurality of second tips, and electrically insulated from the first electrode. ### Claim 2 (depends on 1) The ultraviolet detector as claimed in claim 1, wherein the substrate includes silicon, germanium, indium phosphide, gallium arsenide or silicon carbide. ### Claim 3 (depends on 1) The ultraviolet detector as claimed in claim 1, wherein the first and second electrodes are disposed on a surface of the substrate. ### Claim 4 (depends on 1) The ultraviolet detector as claimed in claim 1, wherein the first electrode comprises a spiral-shaped electrode with the first tips, and the second electrode comprises a spiral-shaped electrode with the second tips. ### Claim 5 (depends on 1) The ultraviolet detector as claimed in claim 1, wherein the first electrode comprises a plurality of ring-shaped electrodes electrically connected to each other and have the first tips, and the second electrode comprises a plurality of ring-shaped electrodes electrically connected to each other and have the second tips. ### Claim 6 (depends on 1) The ultraviolet detector as claimed in claim 1, wherein the first electrode comprises a finger-shaped electrode with the first tips, and the second electrode comprises a finger-shaped electrode with the second tips. ### Claim 7 (depends on 1) The ultraviolet detector as claimed in claim 1, further comprising an anti-reflection coating for covering the substrate, the first electrode, and the second electrode. ### Claim 8 (depends on 7) The ultraviolet detector as claimed in claim 7, further comprising a filter disposed on the anti-reflection coating. ### Claim 9 An ultraviolet detector, comprising: a substrate; a first electrode disposed on the substrate, wherein the first electrode has a plurality of first tips; a second electrode disposed on the substrate, wherein the second electrode has a plurality of second tips, and electrically insulated from the first electrode; and an active layer disposed on the substrate and electrically connected to the first and second electrodes for absorbing an ultraviolet light and generating charges, wherein the first and the second electrodes are embedded in the active layer. ### Claim 10 (depends on 9) The ultraviolet detector as claimed in claim 9, wherein the substrate includes silicon, germanium, indium phosphide, gallium arsenide, or silicon carbide. ### Claim 11 (depends on 10) The ultraviolet detector as claimed in claim 10, wherein a material of the active layer is the same as that of the substrate. ### Claim 12 (depends on 9) The ultraviolet detector as claimed in claim 9, wherein the active layer covers the substrate, the first electrode, and the second electrode. ### Claim 13 (depends on 9) The ultraviolet detector as claimed in claim 9, wherein the first and second electrodes cover the active layer. ### Claim 14 (depends on 9) The ultraviolet detector as claimed in claim 9, wherein the first electrode comprises a spiral-shaped electrode with the first tips, and the second electrode comprises a spiral-shaped electrode with the second tips. ### Claim 15 (depends on 9) The ultraviolet detector as claimed in claim 9, wherein the first electrode comprises a plurality of ring-shaped electrodes electrically connected to each other and have the first tips, and the second electrode comprises a plurality of ring-shaped electrodes electrically connected to each other and have the second tips. ### Claim 16 (depends on 9) The ultraviolet detector as claimed in claim 9, wherein the first electrode comprises a finger-shaped electrode with the first tips, and the second electrode comprises a finger-shaped electrode with the second tips. ### Claim 17 (depends on 9) The ultraviolet detector as claimed in claim 9, further comprising an anti-reflection coating disposed on the active layer. ### Claim 18 (depends on 17) The ultraviolet detector as claimed in claim 17, further comprising a filter disposed on the anti-reflection coating.