# US 7,407,827 B2 · Semiconductor mechanical sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,407,827 B2 - Document ID: US7407827B2 - Status: Granted - Kind: B2 - Application number: 11/210,006 - Filed: 2005-08-23 - Published: 2006-01-26 - Granted: 2008-08-05 - Earliest claimed: 1992-08-21 - Assignees: Denso Corporation - Inventors: Tetsuo Fujii; Masahito Imai - Web page: https://patentgrep.com/patent/US7407827B2 ## CPC - B81B 7/0006: {Interconnects} - C07C 303/32: of salts of sulfonic acids - C07C 303/44: Separation; Purification - G01C 19/56: Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces - G01C 19/5656: the devices involving a micromechanical structure - G01C 19/5719: using planar vibrating masses driven in a translation vibration along an axis - G01P 15/0802: {Details} - G01P 15/125: by capacitive pick-up - B81B 2201/0235: Accelerometers - G01P 2015/0817: {for pivoting movement of the mass, e.g. in-plane pendulum} - G01P 2015/0828: {the mass being of the paddle type being suspended at one of its longitudinal ends} - Y10T 29/49002: Electrical device making - Y10T 29/49004: including measuring or testing of device or component part - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - C07C: ACYCLIC OR CARBOCYCLIC COMPOUNDS - G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S) - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected. ## Claims ### Claim 1 A method of manufacturing a mechanical force sensing semiconductor device being provided with: a substrate; a movable portion which is disposed on said substrate and movably formed with respect to the substrate; and an upper structural member which is formed at least on said movable portion and spaced therefrom via a space, wherein the method comprising: a first step of filling a filling material at least on the upper surface of said movable portion being defined on said substrate; a second step of forming layers to obtain said upper structural member on said filling material; a third step of forming a window portion in said upper structural member; and a fourth step of removing said filling material by etching achieved through said window portion to obtain said space at least between said movable portion and said upper structural member. ### Claim 2 (depends on 1) A method as set forth in claim 1, wherein: said first step further having a step of filling the peripheral region of said movable portion around its bottom and side as well with said filling material; and said fourth step further having a step of removing said filling material being filled around said peripheral region of said movable portion to obtain said space around the movable portion as well. ### Claim 3 (depends on 2) A method as set forth in claim 2, wherein said further step to said first step, where said filling material is filled around said peripheral region of said movable portion, is performed prior to said first step of filling the upper surface of said movable portion with said filling material. ### Claim 4 (depends on 1) A method as set forth in claim 1, wherein said window portion is formed at each of a plurality of locations facing to the space to be disposed close to the side of said movable portion. ### Claim 5 (depends on 1) A method as set forth in claim 1, wherein said upper structural member comprising both an insulation film and an electrode layer; and said second step of forming layers to obtain said upper structural member further having (i) a step of forming said insulation film on said filling material and (ii) a step of forming a metal layer to obtain said electrode layer on the insulation film. ### Claim 6 A method of manufacturing a mechanical force sensing semiconductor device being provided with: a substrate; a movable portion which is disposed on said substrate and movably formed with respect to the substrate; and an upper structural member which is formed at least on said movable portion and spaced therefrom via a space, wherein the method comprising: a first step of removing, by etching, a part of a semiconductor layer by which said movable portion is to be formed and defining the structure of the movable portion; a second step of filling the region where said semiconductor layer is removed by said etching with a filling material and also filling the upper surface of said movable portion with a filling material; a third step of forming layers to obtain said upper structural member on said filling material; a fourth step of forming a window portion in said upper structural member; and a fifth step of removing said filling material by etching achieved through said window portion to form said space around said movable portion so as to make the movable portion movable. ### Claim 7 (depends on 6) A method as set forth in claim 6, wherein said second step further having a step of filling the peripheral region of said movable portion around its bottom and side as well with said filling material, which further step to said second step, where said filling material is filled around said peripheral region of said movable portion, is performed prior to said second step of filling the upper surface of said movable portion with said filling material. ### Claim 8 (depends on 6) A method as set forth in claim 6, wherein said window portion is formed at each of a plurality of locations facing to the space to be disposed close to the side of said movable portion. ### Claim 9 (depends on 6) A method as set forth in claim 6, wherein said upper structural member comprising both an insulation film and an electrode layer, and said third step of forming layers to obtain said upper structural member further having (i) a step of forming said insulation film on said filling material and (ii) a step of forming a metal layer to obtain said electrode layer on the insulation film.