# US 7,406,756 B2 · Method for manufacturing a piezoelectric resonator

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 7,406,756 B2
- Document ID: US7406756B2
- Status: Granted
- Kind: B2
- Application number: 10/970,696
- Filed: 2004-10-21
- Published: 2005-06-02
- Granted: 2008-08-05
- Earliest claimed: 2003-10-22
- Assignees: Seiko Epson Corporation
- Inventors: Kazushige Umetsu; Kazuto Yoshimura; Tsukasa Funasaka; Fumitaka Kitamura
- Web page: https://patentgrep.com/patent/US7406756B2

## CPC

- H03H 9/21: Crystal tuning forks
- H03H 3/02: for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence)
- H03H 2003/026: {the resonators or networks being of the tuning fork type}
- Y10T 29/42: Piezoelectric device making
- Y10T 29/49126: Assembling bases
- Y10T 29/49128: Assembling formed circuit to base
- Y10T 29/4913: Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T 29/49155: Manufacturing circuit on or in base
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method for manufacturing a piezoelectric resonator is provided including: forming a resonator element having a plate-like base and a plurality of arms extending laterally from the base on a substrate made of crystal; emitting laser light for irradiating one surface and the other surface of the arms with laser light and for removing a region irradiated with the laser light, so as to form a groove having a predetermined cross sectional shape perpendicular to the longitudinal direction of the groove; forming a driving electrode on the resonator element.

## Claims

### Claim 1

A method for manufacturing a crystal piezoelectric resonator including a crystal resonator element having a plate-like base and two arms extending substantially parallel to one another and substantially perpendicular to the base, the method comprising:
irradiating a first surface of the arms with F2 excimer laser light;
irradiating a second surface of the arms with F2 excimer laser light, the second surface being formed on an opposite side of the arms from the first surface;
removing a region irradiated with the F2 excimer laser light to form a first groove in the first surface, the first groove having a predetermined cross sectional shape perpendicular to a longitudinal direction of the first groove and including a length extending along a length of each arm and a width extending along a width of each arm, the length of each first groove extending substantially parallel to a first groove of an adjacent arm and substantially perpendicular to the base; and
removing a region irradiated with the F2 excimer laser light to form a second groove in the second surface having a length extending along a length of each arm and a width extending along a width of each arm, the length of each second groove extending substantially parallel to a second groove of an adjacent arm, substantially parallel to the first groove, and substantially perpendicular to the base, the second groove having a predetermined cross sectional shape perpendicular to a longitudinal direction of the second groove and cooperating with the first groove to provide each arm with a substantially H-shaped cross section, the second groove being formed on an opposite side of the arms from the first groove and being coaxially aligned with the first groove.

### Claim 2 (depends on 1)

The method for manufacturing a piezoelectric resonator according to claim 1, wherein:
the F2 excimer laser light is emitted with equalized intensities in an irradiated area by a diffractive optical element.

### Claim 3 (depends on 2)

The method for manufacturing a piezoelectric resonator according to claim 2, wherein:
the diffractive optical element comprises a phase grating.