Control of X-ray beam spot size
AssigneeJordan Valley Semiconductors Ltd.
InventorDavid Berman
Life of this patent
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Abstract
Apparatus for analysis of a sample includes a radiation source, which is configured to direct a beam of radiation along a beam axis to impinge on a target area on a surface of the sample. A detector assembly is configured to sense the radiation scattered from the sample. A beam control assembly includes a beam blocker, which has a lower side adjoining the surface of the sample, and which contains front and rear slits perpendicular to the lower side that together define a beam plane that contains the beam axis and passes through the target area. The front slit is located between the radiation source and the target area, and the rear slit is located between the target area and the detector assembly.
Claims26
Apparatus for analysis of a sample, comprising:
- a radiation source, which is configured to direct a beam of radiation along a beam axis to impinge on a target area on a surface of the sample;
- a detector assembly, which is configured to sense the radiation scattered from the sample;
- and
- a beam control assembly, comprising a beam blocker, which has a lower side adjoining the surface of the sample, and which contains front and rear slits perpendicular to the lower side that together define a beam plane that contains the beam axis and passes through the target area, wherein the front slit is located between the radiation source and the target area, and the rear slit is located between the target area and the detector assembly.
A method for analysis of a sample, comprising:
- directing a beam of radiation along a beam axis to impinge on a target area on a surface of the sample;
- interposing in the beam a beam blocker containing front and rear slits that together define a beam plane that contains the beam axis and passes through the target area, so that a lower side of the beam blocker adjoins the surface of the sample and so that the beam of radiation passes through the front slit before impinging on the target area, and the radiation scattered from the sample within the beam plane passes through the rear slit;
- and sensing the radiation scattered from the sample after passage of the radiation through the rear slit.
Dependencies are inferred from the claim text.