X-ray inspection apparatus, X-ray inspection method, and X-ray inspection program
AssigneeNagoya Electric Works Co. Ltd.
InventorsAtsushi Teramoto, Takayuki Murakoshi
Life of this patent
Estimating the term…
Abstract
In an inspection of an object of inspection with use of X-rays, X-rays are output from an X-ray source disposed fixedly into a range of a predetermined solid angle and, while the object of inspection is moved along a plane within the output range of the X-rays, the X-rays are detected, in positions included in the solid angle and at a plurality of revolved points around an axis oriented vertical to the plane along which the object of inspection is moved, with its detecting surface tilted down toward the axis. Thus, the object can be inspected based on the detected X-rays.
Claims17
An X-ray inspection apparatus comprising:
- an X-ray output device having a single X-ray source which is fixedly disposed, and which outputs X-rays into a range of a predetermined solid angle having an axis;
- a planar movement mechanism for moving an object of inspection along a plane within the range of the predetermined solid angle;
- an X-ray detector for detecting X-rays, in positions included in the predetermined solid angle and at at least three revolved points around the axis oriented perpendicular to the plane along which the object of inspection is moved, with its detecting surface tilted down toward the axis, the X-ray detector disposed above the X-ray source, wherein the X-ray detector detects the object of inspection in a plurality of object positions on the plane;
- and
- an object inspection device for inspecting the object of inspection based on the detected X-rays.
A method of X-ray inspection for inspecting an object of inspection with X-rays which comprises:
- outputting X-rays from a single X-ray source, disposed fixedly, into a range of a predetermined solid angle having an axis;
- moving the object of inspection along a plane within the range of the predetermined solid angle;
- detecting X-rays, in positions included in the predetermined solid angle and at atleast three revolved points around the axis oriented perpendicular to the plane along which the object of inspection is moved, with its detecting surface tilted down toward the axis;
- wherein the detecting includes detecting the object of inspection in a plurality of object positions on the plane;
- and
- inspecting the object of inspection based on detected X-rays.
A computer-readable medium encoded with a program of X-ray inspection for inspecting an object of inspection, the program instructing a device to perform functions comprising:
- an X-ray outputting function for controlling a single X-ray source disposed fixedly to output X-rays into a range of a predetermined solid angle having an axis;
- a planar-transport control function for controlling a planar transport mechanism to move the object of inspection along a plane within the range of the predetermined solid angle;
- an X-ray detection function for controlling detection of the X-rays, in positions included in the predetermined solid angle and at at least three revolved points around the axis oriented perpendicular to the plane along which the object of inspection is moved, with its detecting surface tilted down toward the axis;
- wherein the detecting function detects the object of inspection in a plurality of object positions on the planet;
- and
- an object inspecting function to inspect the object of inspection based on the detected X-rays, wherein the device performs all of the functions enumerated above.
Dependencies are inferred from the claim text.