X-ray microscope with microfocus source and Wolter condenser
AssigneeXradia, Inc.
InventorsWenbing Yun, Yuxin Wang, Michael Feser, Frederick W. Duewer
Life of this patent
Estimating the term…
Abstract
An x-ray microscope uses a microfocus x-ray source with a focus spot of less than 10 micrometers and a Wolter condenser having a magnification of about four or more for concentrating x-rays from the source onto a sample. A detector is provided for detecting the x-rays after interaction with the sample, and an x-ray objective is used to form an image of the sample on the detector. The use of the Wolter optic addresses a problem with microfocus sources that arise when the size of the focal spot that must then be imaged onto the sample with the condenser is smaller than the field of view.
Claims14
An x-ray microscope, comprising:
- a microfocus x-ray source with a focus spot of less than 10 micrometers;
- a Wolter condenser having a magnification of about two or more for magnifying and imaging the focus spot from the source onto a sample and concentrating x-rays from the source onto the sample;
- a detector for detecting the x-rays after interaction with the sample;
- and
- an x-ray objective for forming an image of the sample on the detector.
An x-ray microscope, comprising:
- a microfocus x-ray source with a focus spot of less than 10 micrometers;
- a Wolter condenser having a magnification of about two or more for concentrating x-rays from the source onto a sample;
- a detector for detecting the x-rays after interaction with the sample;
- and
- an x-ray objective for forming an image of the sample on the detector;
- wherein a length of an ellipsoidal segment of the condenser is 1.5 or more times longer than an hyperbolic segment.
Dependencies are inferred from the claim text.