Efficient EUV collector designs
AssigneeIntel Corporation
InventorJose Sasian
Life of this patent
Estimating the term…
Abstract
A collector that includes a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and raveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source.
Claims17
A collector comprising:
- a discharge extreme ultra violet (EUV) light source that is not a laser produced plasma EUV light source;
- an optical path from said source to a mirror, said mirror being a first mirror that light emitted from said source and traveling along said optical path impinges upon, said first mirror positioned to receive the light emitted from said source at a normal or nearly normal angle of incidence,
- wherein said optical path further comprises a second mirror to reflect light reflected from said first mirror toward an illumination system, said illumination system to form a light beam from a plurality of light beams, and
- wherein light reflected from said first mirror and said second mirror is reflected from said second mirror at a normal or nearly normal angle of incidence, and
- wherein the first mirror and the second mirror do not surround or approximately surround the discharge EUV light source.
Dependencies are inferred from the claim text.