Spatial light modulator having a cantilever anti-stiction mechanism
AssigneeSpatial Photonics, Inc.
InventorsShaoher X. Pan, Vlad Novotny
Life of this patent
Estimating the term…
Abstract
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the lower portion of the mirror plate. The mirror plate can tilt around a hinge component extending into the first cavity. The hinge component is supported by a stationary substrate. The tilt movement of the mirror plate can be stopped when the cantilever comes to contact with a stationary object.
Claims38
A spatial light modulator, comprising:
- a mirror plate comprising a reflective upper surface, a lower surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the lower surface of the mirror plate, wherein the mirror plate is configured to tilt around a hinge component extending into the first cavity, the hinge component being supported by a stationary substrate, and wherein the tilt movement of the mirror plate can be stopped when the cantilever comes into contact with a stationary object.
A spatial light modulator, comprising:
- a mirror plate comprising a reflective upper surface, a lower surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the lower surface of the mirror plate, wherein the mirror plate is configured to tilt around a hinge component extending into the first cavity;
- a substrate comprising an upper surface, a hinge support post in connection with the upper surface, and the hinge component in connection with the hinge support post and the mirror plate;
- and
- a landing tip in connection with the upper surface of the substrate, wherein the tilt movement of the mirror plate can be stopped when the cantilever comes into contact with a landing tip.
A method of fabricating a spatial light modulator, the method comprising:
- forming a substrate comprising an upper surface, a hinge support post in connection with the upper surface, a hinge component in connection with the hinge support post, and a landing tip in connection with the upper surface;
- and
- forming a the-mirror plate in connection with the hinge component, comprising a reflective upper surface, a lower surface having a recess in the lower surface, a first cavity having an opening in the lower surface, and a cantilever situated under the recess and connected with the lower surface of the mirror plate, wherein the hinge component extends into the first cavity to permit the mirror plate to tilt around the hinge component, and wherein the cantilever can stop the tilt movement of the mirror plate by coming into contact with the landing tip.
Dependencies are inferred from the claim text.