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US 7,405,861 B2Granted
Method and device for protecting interferometric modulators from electrostatic discharge
AssigneeIdc, LLC
InventorPhilip D. Floyd
Life of this patent
Estimating the term…
Abstract
A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS device. The protection element may be a diode and may be formed by depositing a plurality of doped semiconductor layers over the substrate on which the MEMS device is formed.
Claims17
A MEMS device comprising:
- a moveable element;
- an electrical conductor configured to carry an actuation current that is effective to actuate the moveable element;
- and
- a protection element operably attached to the electrical conductor and configured to at least partially shunt to ground an excess current carried by the electrical conductor, the protection element comprising a diode,
- the moveable element, electrical conductor and protection element being integrally formed over a substrate.
2 more elements
An interferometric modulator comprising:
- an electrode integrated with a substrate and configured to carry an actuation current;
- and
- a protection element connected to the electrode and configured to at least partially shunt to ground an excess current carried by the electrode, the protection element comprising a diode, the protection element being integrally formed with the substrate.
A display device comprising;
- a substrate;
- a plurality of interferometric modulators formed over the substrate;
- and
- a plurality of protection elements integrally formed with the plurality of interferometric modulators over the substrate, the plurality of protection elements comprising a plurality of doped semiconductor layers;
- the plurality of protection elements being electrically connected to at least partially protect the plurality of interferometric modulators from an electrostatic discharge.
2 more elements
Dependencies are inferred from the claim text.