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US 7,405,852 B2Granted
Display apparatus and methods for manufacture thereof
AssigneePixtronix, Inc.
InventorsTimothy J. Brosnihan, Nesbitt W. Hagood, IV, Jasper Lodewyk Steyn, Jignesh Gandhi, John J. Fijol, Richard S. Payne, Roger Barton
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Abstract
Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
Claims21
A method of forming a spatial light modulator including a shutter supported by a compliant beam, the method comprising:
- forming a mold on a substrate, wherein the mold includes a lower horizontal surface, an upper horizontal surface and a wall;
- depositing a beam material on the lower horizontal surface and the wall of the mold;
- removing the beam material deposited on the lower horizontal surface of the mold while leaving the majority of the beam material deposited on the wall of the mold in place to form the compliant beam;
- forming the shutter coupled to the compliant beam;
- and
- removing the mold, thereby releasing the shutter and remaining beam material.
3 more elements
Dependencies are inferred from the claim text.