Method and apparatus for classifying defects of an object

An apparatus for identifying types of defects of an object, comprising:

• light creating means configured to emit first and second lights having different polarizations on an inspection spot on the object;
• a detecting member configured to collect first and second scattered lights that are created from the respective first and second lights scattering from the inspection spot;
• and
• a classifier coupled to the detecting member, wherein:
• the classifier is configured to identify a first type of defect in the object based on both the first scattered light and the second scattered light, and
• the classifier is configured to identify a second type of defect in the object based on only one of the first scattered light and the second scattered light.

A method for identifying types of defects of an object, comprising:

• irradiating a first polarized light onto an inspection spot on the object;
• collecting a first scattered light created by the first polarized light scattering from the inspection spot using a first detector;
• irradiating a second polarized light onto the inspection spot;
• collecting a second scattered light created by the second polarized light scattering from the inspection spot using a second detector;
• identifying types of defects in the object based on the first and second scattered lights;
• determining, based on the identified types of defects, whether the defects exceed a predetermined level;
• and
• altering a manufacturing process when the defects exceed the predetermined level, wherein identifying the types of defects includes:
• identifying a first type of defect based on both the first scattered light and the second scattered light, and
• identifying a second type of defect based on only one of the first scattered light and the second scattered light.

An apparatus for identifying types of defects of an object, comprising:

• a first light source configured to irradiate a first polarized light onto an inspection spot on the object;
• a first detector configured to collect a first scattered light that is created from the first polarized light scattering from the inspection spot;
• a second light source configured to irradiate a second polarized light onto the inspection spot;
• a second detector configured to collect a second scattered light that is created from the second polarized light scattering from the inspection spot;
• and
• a classifier coupled to the first and second detectors, wherein:
• the classifier is configured to identify a first type of defect in the object based on both the first scattered light and the second scattered light, and
• the classifier is configured to identify a second type of defect in the object based on a signal corresponding to only one of the first scattered light and the second scattered light.

A method for classifying defects of an object, comprising:

• irradiating a main light onto a light path changing member;
• creating a first polarized light and a second polarized light from light split from the main light;
• collecting a first scattered light created by the first polarized light scattering from an inspection spot on the object using a first detector;
• collecting a second scattered light created by the second polarized light scattering from the inspection spot using a second detector;
• and
• identifying types of defects in the object based on the first and second scattered lights;
• determining, based on the identified types of defects, whether the defects exceed a predetermined level;
• and
• altering a manufacturing process when the defects exceed the predetermined level, wherein identifying the types of defects includes:
• identifying a first type of defect based on both the first scattered light and the second scattered light, and
• identifying a second type of defect based on only one of the first scattered light and the second scattered light.

An apparatus for identifying types of defects of an object, comprising:

• a light source configured to irradiate a main light;
• a light path changing member configured to pass therethrough a first portion of the main light and change a path of a second portion of the main light;
• a first polarizer configured to create a first polarized light from the first portion of the main light;
• a second polarizer configured to create a second polarized light from the second portion of the main light;
• a first detector configured to collect a first scattered light that is created from the first polarized light scattering from an inspection spot on the object;
• a second detector configured to collect a second scattered light that is created from the second polarized light scattering from the inspection spot;
• and
• a classifier coupled to the first and second detectors, wherein:
• the classifier is configured to identify a first type of defect in the object based on both the first scattered light and the second scattered light, and
• the classifier is configured to identify a second type of defect in the object based on a signal corresponding to only one of the first scattered light and the second scattered light.