Inductor and method of forming the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJoo-Hyun Jeong, Chul-Ho Chung
Life of this patent
Estimating the term…
Abstract
An inductor pattern is formed on a substrate. A conductive pattern having a concave-convex structure is formed on the inductor pattern to increase a surface area of the inductor pattern. An insulation layer is formed on the inductor pattern. After a groove is formed such that the insulation layer is removed to expose the inductor pattern, a conductive pattern is conformally formed on the groove and the insulation layer. Thus, a surface area of the inductor pattern as well as a thickness of an inductor increases to obtain an inductor of a high quality factor.
Claims7
A method for forming an inductor, comprising:
- forming an inductor pattern on a substrate;
- forming an insulation layer on the substrate including the inductor pattern;
- patterning the insulation layer to form a groove along the inductor pattern, the groove exposing a top and a sidewall of the inductor pattern;
- and
- conformally forming a conductive pattern in the groove, on the top surface and sidewall of the inductor pattern and on the insulation layer.
Dependencies are inferred from the claim text.