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AssigneeRohm and Haas Electronic Materials LLC
InventorsDavid W. Sherrer, John J. Fisher
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Provided are coaxial waveguide microstructures. The microstructures include a substrate and a coaxial waveguide disposed above the substrate. The coaxial waveguide includes: a center conductor; an outer conductor including one or more walls, spaced apart from and disposed around the center conductor; one or more dielectric support members for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor; and a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state. Also provided are methods of forming coaxial waveguide microstructures by a sequential build process and hermetic packages which include a coaxial waveguide microstructure.
A coaxial waveguide microstructure, comprising a plurality of coaxial waveguides formed by a sequential build process, the coaxial waveguides each comprising a respective center conductor and a corresponding outer conductor comprising one or more walls spaced apart from and disposed around the center conductor, wherein at least one of the respective outer conductor walls has an opening extending from an exterior surface of the outer conductor to an interior surface of the respective outer conductor, and wherein the plurality of coaxial waveguides are disposed in a stacked arrangement.
A method of forming a coaxial waveguide microstructure, comprising forming a plurality of coaxial waveguides by a sequential build process, the sequential build process comprising depositing a plurality of layers over a substrate, the plurality of coaxial waveguides each comprising a respective center conductor and a corresponding outer conductor comprising one or more walls spaced apart from and disposed around the respective center conductor, wherein the plurality of coaxial waveguides are disposed in a stacked arrangement.
Dependencies are inferred from the claim text.