GMR angle sensor for vehicles
AssigneeAlps Electric Co., Ltd.
InventorsYoshikazu Shimizu, Ichiro Tokunaga, Kenji Honda
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Abstract
A GMR angle sensor for vehicles includes a GMR element in which the element resistance is changed in response to an external magnetic field, lead conductors connected to either end of the GMR element, and a protective layer that seals the GMR element and the lead conductors, wherein the protective layer has a laminated structure including an oxidation-resistant inorganic film that ensures that the GMR element and the lead conductors are sufficiently insulated and a silicone-based organic film laminated on the inorganic film.
Claims12
A GMR angle sensor for vehicles comprising:
- a giant magnetoresistive element in which the element resistance is changed in response to an external magnetic field;
- lead conductors connected to the giant magnetoresistive element;
- and
- a protective layer that seals the giant magnetoresistive element and the lead conductors, wherein the protective layer has a laminated structure including:
- an inorganic film provided on the giant magnetoresistive element and the lead conductors, which ensures that the giant magnetoresistive element and the lead conductors are sufficiently insulated;
- and
- a silicone-based organic film provided on the inorganic film, and wherein the inorganic film comprises a silica (SiO2) film and an oxidation-preventing film laminated on the lower surface of the silica film, the oxidation-preventing film being an alumina (Al2O3) film having a thickness smaller than a thickness of the silica film.
A GMR angle sensor for vehicles, comprising:
- a giant magnetoresistive element formed on a substrate, a resistance of the giant magnetoresistive element being changed in response to an external magnetic field;
- lead conductors formed on the substrate, the lead conductors connected to the giant magnetoresistive element;
- and
- a protective layer formed on the giant magnetoresistive element and the lead conductors, the protective layer sealing the giant magnetoresistive element and at least part of the lead conductors,
- wherein the protective layer has a laminated structure comprising:
- an inorganic film provided on the giant magnetoresistive element and the lead conductors;
- and
- a silicone-based organic film provided on the inorganic film, and wherein the inorganic film comprises:
- an oxidation-preventing film formed on the giant magnetoresistive element and the lead conductors, and
- a silica (SiO2) film laminated over the oxidation-preventing film.
Dependencies are inferred from the claim text.