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US 7,405,432 B2Granted
Exposure device, exposure method and method of manufacturing semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorHiroki Adachi
Life of this patent
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Abstract
The present invention provides a highly controllable device for exposure from the back side and an exposure method, and also provides a method of manufacturing a semiconductor device using the same. The present invention involves exposure with the use of the back side exposure device of which a reflecting means is disposed on the front side of a substrate, apart from a photosensitive thin film surface by a distance X (X=0.1 μm to 1000 μm), and formation of a photosensitive thin film pattern in a self alignment manner, with good controllability, at a position a distance Y away from the end of a pattern. The invention fabricates a TFT using that method.
Claims56
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer over the pixel electrode;
- and
- a cathode over the light emitting layer.
8 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film comprising a resin over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer over the pixel electrode;
- and
- a cathode over the light emitting layer.
8 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode comprising a transparent conductive film on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer over the pixel electrode;
- and
- a cathode over the light emitting layer.
8 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a third insulating film having an opening over the pixel electrode covering an edge of the pixel electrode;
- a light emitting layer over the pixel electrode in the opening and the third insulating film;
- and
- a cathode over the light emitting layer.
9 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a third insulating film comprising a resin having an opening over the pixel electrode covering an edge of the pixel electrode;
- a light emitting layer over the pixel electrode in the opening and the third insulating film;
- an
- a cathode over the light emitting layer.
9 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer over the pixel electrode;
- a cathode over the light emitting layer;
- and
- a filling material over the cathode.
9 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer over the pixel electrode;
- a cathode over the light emitting layer;
- a filling material over the cathode;
- and
- a covering material on the filling material,
- wherein the filling material functions as an adhesive to adhere to the covering material.
11 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer over the pixel electrode;
- a cathode over the light emitting layer;
- a filling material over the cathode;
- and
- a glass plate on the filling material,
- wherein the filling material functions as an adhesive to adhere to the glass plate.
11 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer emitting white light over the pixel electrode;
- a cathode over the light emitting layer;
- and
- color filters in combination with the light emitting layer.
9 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film over the wiring;
- a pixel electrode on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a light emitting layer over the pixel electrode;
- and
- a cathode over the light emitting layer,
- wherein a light emitted from the light emitting layer radiates in an upward direction of the cathode.
9 more elements
A display device comprising:
- a substrate;
- a gate electrode over the substrate;
- a gate insulating film over the gate electrode;
- a semiconductor film over the gate insulating film;
- a first interlayer insulating film over the semiconductor film;
- a wiring on the first interlayer insulating film connecting the semiconductor film through a first contact hole in the first interlayer insulating film;
- a second interlayer insulating film comprising a first resin over the wiring;
- a pixel electrode comprising a transparent conductive film on the second interlayer insulating film connecting the wiring through a second contact hole in the second interlayer insulating film;
- a third insulating film comprising a second resin having a opening over the pixel electrode covering an edge of the pixel electrode;
- a light emitting layer emitting white light over the pixel electrode in the opening and the third insulating film;
- an
- a cathode over the light emitting layer
- a filling material over the cathode;
- a glass plate on the filling material;
- and
- color filters in combination with the light emitting layer,
- wherein the filling material functions as an adhesive to adhere to the glass plate.
14 more elements
Dependencies are inferred from the claim text.