Method and apparatus for patterning a workpiece
AssigneeMicronic Laser Systems AB
InventorTorbjorn Sandstrom
Life of this patent
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Abstract
The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle having a multitude of modulating elements (pixels). The pixels are arranged in said computer controlled reticle according to a digital description. An image of said computer controlled reticle is created on said workpiece, wherein said pixels in said computer controlled reticle are arranged in alternate states along at least a part of one feature edge in order to create a smaller address grid. The invention also relates to an apparatus for creating a pattern on a workpiece. The invention also relates to a semiconducting wafer and a mask.
Claims29
A method for creating a pattern with improved virtual grid on a workpiece sensitive to electromagnetic radiation comprising the actions of:
- emitting electromagnetic radiation onto a computer controlled reticle having a multitude of modulating elements (pixels),
- arranging the pixels in said computer controlled reticle according to a digital description,
- creating an image of said computer controlled reticle on said workpiece, wherein said pixels in said computer controlled reticle are arranged in alternate grayscale states along at least a part of one feature edge in order to create a smaller address grid.
An apparatus for creating a pattern on a workpiece sensitive to electromagnetic radiation comprising:
- a source to emit electromagnetic radiation onto a computer controlled reticle having a multitude of modulating elements (pixels),
- a projection system to create an image of said computer controlled reticle on said workpiece, wherein said pixels in said computer controlled reticle are arranged in alternate grayscale states along at least a part of a boundary of at least one element to be patterned, in order to fine-adjust the position of an edge of said element in said image to be created on the workpiece.
Dependencies are inferred from the claim text.