Ion source with multi-piece outer cathode
AssigneeGuardian Industries Corp.
InventorHugh A. Walton
Life of this patent
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Abstract
In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereby permitting adjustment of the magnetic gap between the inner and outer cathodes. This allows improved performance to be realized, and/or prolonged operating life of certain components. This may also permit multiple types of gap adjustment to be performed with different sized outer cathode end pieces. In certain example embodiments, cathode fabrication costs may also be reduced.
Claims19
An ion source comprising:
- a conductive cathode comprising an inner cathode and an outer cathode;
- an ion emitting gap formed at least partially between the inner cathode and the outer cathode;
- an anode located proximate the ion emitting gap;
- wherein the outer cathode comprises first, second, third and fourth electrically connected conductive pieces which are at least partially coplanar, wherein each of the first, second, third and fourth conductive pieces of the outer cathode abuts, is substantially coplanar with at at least one major surface thereof, and directly contacts two of the other of said conductive pieces of the outer cathode;
- and
- wherein an abutting interface between the second and third conductive pieces is angled so as to define an angle θ of from about 110-170 degrees with a portion of the ion emitting gap at said abutting interface.
An ion source comprising:
- first and second electrodes, wherein the first electrode comprises an inner electrode and an outer electrode that are spaced apart from one another;
- an ion emitting gap formed at least partially between the inner electrode and the outer electrode;
- the second electrode being located proximate the ion emitting gap;
- and
- wherein the outer electrode comprises first, second, third and fourth electrically connected conductive pieces, wherein each of the first, second, third and fourth conductive pieces of the outer electrode is adjustable and can be adjusted toward and/or away from the ion emitting gap so that four-way adjustability can be realized, and wherein an interface between the second and third conductive pieces is angled relative to an immediately adjacent edge of the ion emitting gap, and an interface between the first and fourth conductive pieces is angled relative to an immediately adjacent edge of the ion emitting gap.
Dependencies are inferred from the claim text.