Gas cluster-ion irradiation apparatus

A gas cluster ion irradiation apparatus comprising:

• a gas cluster generation unit which generates gas clusters of gaseous atoms or molecules aggregated in a cluster;
• an ionization unit which ionizes said gas clusters;
• and
• an ion transportation chamber which transports ionized gas cluster ions in a direction of a work disposed in an ion irradiation chamber;
• wherein a pressure (Pa) in said gas cluster ion transportation chamber, in which gas cluster ions having energy E (eV) and an average size N are transported, is controlled by using an air exhaust unit provided at said ion transportation chamber, so that a product of said pressure (Pa) in said gas cluster ion transportation chamber and a gas cluster ion transportation length (m) is equal to or less than 30/N2/3/E1/2.

A gas cluster ion irradiation apparatus comprising:

• a gas cluster generation unit which generates gas clusters of gaseous atoms or molecules aggregated in a cluster;
• an ionization chamber disposed adjacent to said gas cluster generation unit, said ionization chamber including an ionization unit which ionizes said gas clusters;
• and
• an ion transportation chamber which transports ionized gas cluster ions in a direction of a work disposed in an ion irradiation chamber;
• wherein said ionization chamber and said ion transportation chamber are disposed via a chamber partition having an aperture which allows said gas cluster ions to pass therethrough;
• and
• wherein a pressure (Pa) in said ion transportation chamber, in which gas cluster ions having energy E (eV) and an average size N are transported, is controlled by using an air exhaust unit provided at said ion transportation chamber, so that a product of said pressure (Pa) in said ion transportion chamber and a gas cluster ion transportation length (m) is equal to or less than 30/N2/3E1/2.