US 7,405,389 B2Granted

Dense multi-axis array for motion sensing

AssigneeSilicon Light Machines Corporation

InventorsMichael J. Dueweke, Douglas A. Webb

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Abstract

The present disclosure describes an optical displacement sensor having a dense multi-axis array of photosensitive elements. Generally, the sensor includes a two dimensional array of multiple photosensitive elements. In one embodiment, the array includes multiple linear arrays of photosensitive elements arranged along three or more axes in a space-filling, close-packed multi-axis array. The photosensitive elements are connected to each other in such a way that motion is determinable along each of the axes by measuring differential photocurrents between photosensitive elements along each of the axes. The inventive architecture advantageously increases signal redundancy, and reduces signal drop-out or low signals due to random fluctuations in the incident or absorbed light or in the signals from the photosensitive elements.

Claims8

Dependent claims

An optical displacement sensor for sensing relative movement between the sensor and a surface by detecting changes in optical features of light reflected from the surface, the sensor comprising:

a two-dimensional array of photosensitive elements, the array including multiple groupings of photosensitive elements arranged along at least three (3) axes, so as to track motion along each of the at least three axes by measuring differential photocurrents between the groupings of photosensitive elements,
whereby signal redundancy is achieved so as to reduce an effect of low signals from photosensitive elements along any particular one of the at least three axes,
wherein each of the at least three axes form non-orthogonal angles to the remaining axes,
wherein the array comprises six (6) groupings of photosensitive elements, two (2) for each axis, arranged at angles of 60, 120 and 180 degrees to a predetermined reference vector so as to form a three-axis hexagonal array, and
wherein the photosensitive elements are further arranged to form a number of hexagonal pixels in the array, and wherein the array further comprises metal routing along each hexagonal pixel to provide light blocking between the pixels and reduce cross-talk between the pixels.

2 more elements

Dependencies are inferred from the claim text.