Method of manufacturing electron-emitting device and method of manufacturing image display apparatus
AssigneeCanon Kabushiki Kaisha
InventorMichiyo Nishimura
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Abstract
A method of manufacturing an electron-emitting device with a stable electrical characteristics without variation per each of the devices is provided, by forming, on a substrate, a cathode electrode, a carbon layer on the cathode electrode, and a gate electrode, disposing an anode electrode, and applying to the carbon layer a voltage higher than that at a driving of the electron-emitting device.
Claims36
A method of manufacturing an electron-emitting device, comprising the steps of:
- preparing a cathode electrode including a carbon layer which has a dipole layer at a surface or on a surface of the carbon layer, and an extraction electrode located apart from the cathode electrode;
- and
- applying a voltage higher than a voltage to be applied to the electron-emitting device at driving of the electron-emitting device between the extraction electrode and the cathode electrode,
- wherein the carbon layer contains hydrogen such that a ratio of hydrogen with respect to carbon in the carbon layer is not smaller than 0.1 atm % and not larger than 20 atm %.
A method of manufacturing an image display apparatus including an anode electrode and a plurality of electron-emitting devices, each of which is located apart from the anode electrode and located on a substrate surface, comprising the steps of:
- (A) preparing a plurality of electron-emitting devices on a substrate surface,
- each of the plurality of electron-emitting devices comprising a cathode electrode, a carbon layer which has a dipole layer at a surface or on a surface of the carbon layer located on the cathode electrode, and a gate electrode located apart from the cathode electrode;
- (B) selecting an electron-emitting device from the plurality of electron-emitting devices;
- and
- (C) applying a voltage higher than a voltage to be applied at driving of the selected electron-emitting device between the gate electrode and the cathode electrode of the selected electron-emitting device,
- wherein the carbon layer contains hydrogen such that a ratio of hydrogen with respect to carbon in the carbon layer is not smaller than 0.1 atm % and not larger than 20 atm %.
A method of driving an image display apparatus including a plurality of electron-emitting devices and a light-emitting member, wherein
- a drive voltage to be applied to each of the plurality of electron-emitting devices is equal to or smaller than a voltage applied to each of the plurality of electron-emitting devices at manufacturing of the plurality of electron-emitting devices;
- wherein each of the plurality of electron-emitting devices comprises a cathode electrode on which a carbon layer is disposed, hydrogen terminating a surface of the carbon layer, and a gate electrode located apart from the cathode electrode, and
- wherein the carbon layer contains hydrogen such that a ratio of hydrogen with respect to carbon in the carbon layer is not smaller than 0.1 atm % and not larger than 20 atm %.
A method of adjusting electron emission characteristics of an electron-emitting device, comprising the steps of:
- preparing an electron-emitting device comprising a cathode electrode on which a carbon layer is disposed, hydrogen terminating a surface of the carbon layer, and an extraction electrode spaced from the cathode electrode;
- and
- applying, between the extraction electrode and the cathode electrode, an adjusting voltage for adjusting the electron emission characteristics of the electron-emitting device,
- wherein the adjusting voltage is higher than a voltage to be applied between the extraction electrode and the cathode electrode at a normal driving for emitting an electron from the carbon layer, and
- wherein the carbon layer contains hydrogen such that a ratio of hydrogen with respect to carbon in the carbon layer is not smaller than 0.1 atm % and not larger than 20 atm %.
A method of manufacturing an electron-emitting device, comprising the steps of:
- (A) preparing (i) a cathode electrode having a carbon layer and (ii) an extraction electrode located apart from the cathode electrode,
- wherein each of carbon atoms of a surface of the carbon layer is bonded to hydrogen atom, and
- wherein 0.1 atm% or more of hydrogen with respect to carbon in the carbon layer is contained in the carbon layer;
- and
- (B) applying a voltage higher than a voltage to be applied to the electron-emitting device at driving of the electron-emitting device between the extraction electrode and the cathode electrode.
A method of manufacturing an electron-emitting device, comprising the steps of:
- (A) preparing, on a cathode electrode, an amorphous carbon layer, a surface of which is hydrogen terminated, wherein the amorphous carbon layer (i) contains a plurality of metal particles each of which contains at least one metal selected from a group of Co, Ni, and Fe, and (ii) has a resistivity of 1×10 ohm cm to 1×1014 ohm cm;
- and
- (B) arranging an extraction electrode spaced from the cathode electrode, and applying a voltage higher than a voltage to be applied to the electron-emitting device at driving of the electron-emitting device between the extraction electrode and the cathode electrode.
Dependencies are inferred from the claim text.