Device and control method for micro wave plasma processing
AssigneeTokyo Electron Limited
InventorsTadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto
Life of this patent
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Abstract
A microwave is introduced into a process chamber through a waveguide (26) of the plasma process apparatus, thereby generating plasma. A reflection monitor (40) and an electric power monitor (42) monitor the electric power of a reflected wave reflected by the plasma that is generated in the process chamber. Moreover, an incidence monitor (36) and a frequency monitor (48) monitor the frequency of the microwave generated by a magnetron (24). An electric power supplied to the magnetron (24) is controlled based on the monitored electric power of the reflected wave and the monitored frequency. This method thus controls plasma density to a constant level.
Claims12
A plasma process controlling method for treating an object by use of plasma that is generated by a microwave, comprising:
- guiding a microwave generated by a microwave generator to a process chamber through a waveguide so as to generate plasma inside said process chamber;
- monitoring a frequency of the microwave generated by said microwave generator;
- monitoring an electric power of a reflected microwave that is reflected by the plasma generated in said process chamber;
- and
- controlling an electric power supplied to said microwave generator based on the electric power of the reflected microwave to provide a constant plasma density in the process chamber.
A plasma process controlling method for treating an object by use of plasma that is generated by a microwave comprising:
- guiding a microwave generated by a microwave generator to a process chamber through a waveguide so as to generate plasma inside said process chamber;
- monitoring an electric power of a reflected microwave;
- monitoring a frequency of the microwave generated by said microwave generator;
- and
- controlling an electric power supplied to said microwave generator based on the frequency of the microwave to provide a constant plasma density in the process chamber.
A plasma process controlling method for treating an object by use of plasma that is generated by a microwave, comprising:
- guiding a microwave generated by a microwave generator to a process chamber through a waveguide so as to generate plasma inside said process chamber;
- monitoring a frequency of the microwave generated by said microwave generator;
- monitoring an electric power of a reflected microwave that is reflected by the plasma occurring in said process chamber;
- and
- controlling an electric power supplied to said microwave generator based on the electric power of the reflected wave and the frequency of the microwave to provide a constant plasma density in the process chamber.
A microwave plasma process apparatus for performing a plasma process by plasma that is generated by a microwave, comprising:
- a microwave generator;
- an electric power controlling device supplying electric power to said microwave generator to generate a microwave having a frequency;
- a process chamber for accommodating an object for treatment by plasma process;
- a waveguide which guides the microwave generated by said microwave generator to said process chamber;
- and
- a reflected-wave monitoring unit which monitors an electric power of a reflected wave, said reflected-wave monitoring unit including:
- a reflection monitor which is provided in said waveguide, and
- an electric power monitor which detects the electric power of the reflected wave monitored by said reflection monitor,
- wherein said reflected-wave monitoring unit is adapted to monitor a change in density of the plasma generated in said process chamber through a change in the electric power of the reflected waves, and
- wherein the electric power controlling device is configured to control the electric power supplied to said microwave generator based on the frequency to provide a constant plasma density.
A microwave plasma process apparatus for performing a plasma process by plasma that is generated by a microwave, comprising:
- a microwave generator;
- an electric power controlling device supplying electric power to said microwave generator to generate a microwave having a frequency;
- a process chamber for accommodating an object for treatment by plasma process;
- a waveguide which guides the microwave generated by said microwave generator to said process chamber;
- and
- a reflected-wave monitoring unit which monitors an electric power of a reflected wave that is reflected by plasma generated in said process chamber, said reflected-wave monitoring unit including:
- a reflection monitor which is provided in said waveguide, and
- an electric power monitor which detects the electric power of the reflected wave monitored by said reflection monitor,
- wherein said waveguide has a matching device for sending back the reflected wave to said process chamber,
- wherein said reflection monitor is provided in said waveguide between said matching device and said process chamber, and
- wherein the electric power controlling device is configured to control the electric power supplied to said microwave generator based on the frequency to provide a constant plasma density in the process chamber.
A microwave plasma process apparatus for performing a plasma process by plasma that is generated by a microwave, comprising:
- a microwave generator;
- an electric power controlling device supplying electric power to said microwave generator to generate a microwave having an unstable frequency;
- a process chamber for accommodating an object for treatment by plasma process;
- a waveguide which guides the microwave generated by said microwave generator to said process chamber;
- and
- a frequency monitoring unit which detects a frequency of the microwave generated by said microwave generator, said frequency monitoring unit including:
- an incident monitor which monitors an electric power of the microwave supplied from said microwave generator, and
- a frequency monitor which detects a frequency of the output from said incident monitor,
- wherein the electric power controlling device is configured to control the electric power supplied to said microwave generator based on the unstable frequency to provide a constant plasma density in the process chamber.
A microwave plasma process apparatus for performing a plasma process by plasma that is generated by a microwave, comprising:
- a microwave generator;
- an electric power controlling device supplying electric power to said microwave generator to generate a microwave having a frequency;
- a process chamber for accommodating an object for treatment by plasma process;
- a waveguide which guides the microwave generated by said microwave generator to said process chamber;
- a reflected-wave monitoring unit which monitors an electric power of a reflected wave that is reflected by plasma occurring in said process chamber;
- and
- a frequency monitoring unit which detects a frequency of the microwave generated by said microwave generator,
- wherein the electric power controlling device is configured to control the electric power supplied to said microwave generator based on the electric power of the reflected wave output from said reflected-wave monitoring unit and the frequency detected by said frequency monitoring unit.
Dependencies are inferred from the claim text.