Sensing element used in sensing device for sensing target substance in specimen by using plasmon resonance
AssigneeCanon Kabushiki Kaisha
InventorsMiki Ogawa, Norihiko Utsunomiya
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Abstract
A method of producing a sensing element used in a detecting device for detecting a target substance in a specimen with the use of plasmon resonance. The method includes the steps of forming an insulating layer on a substrate, the surface of the substrate having an electroconductive layer including a first electroconductive material, forming a plurality of holes through the insulating layer to form an insulating pattern, filling up the holes with a second electroconductive material to form a metallic pattern, removing the insulating pattern, and removing a region other than the region sandwiched by the metallic pattern and the substrate in the electroconductive layer, using the metallic pattern as a mask.
Claims5
A method of producing a sensing element used in a detecting device for detecting a target substance in a specimen with the use of plasmon resonance, said method comprising the steps of:
- forming an insulating layer on a substrate, the surface of the substrate having an electroconductive layer including a first electroconductive material;
- forming a plurality of holes through the insulating layer to form an insulating pattern;
- filling up the holes with a second electroconductive material to form a metallic pattern;
- removing the insulating pattern;
- and
- removing a region in the electroconductive layer, using the metallic pattern as a mask.
Dependencies are inferred from the claim text.