Information recording medium examining apparatus and method

An information recording medium examining apparatus for examining an information recording medium, comprising:

• an information recording medium defect detecting unit including:
• a light source for irradiating said information recording medium with light;
• a stage for rotating said information recording medium;
• a light receiving device for receiving reflection light from said information recording medium;
• and a calculating apparatus for judging whether or not a defect of a pit on said information recording medium is present by comparing information of the received reflection light with design data, and for producing defect positional data of said pit;
• and
• an information recording medium defect observing unit including:
• an electron gun for irradiating a region which contains the defect position indicated by said defect positional data with an electron beam;
• a detector for detecting electrons generated from the region of the information recording medium which is irradiated with the electron beam;
• and an image producing unit for producing an image of a surface of said information recording medium based on the electrons detected by said detector.

An information recording medium recording and examining apparatus for irradiating a surface of an information recording medium with an electron beam so as to record thereon information and for examining an abnormal condition of the recorded information, comprising:

• a first electron gun for irradiating said information recording medium with an electron beam so as to record thereon information;
• a stage for mounting thereon said information recording medium such that said information recording medium can be moved along a rotation direction and a radial direction;
• a second electron gun for irradiating said information recording medium with an electron beam in order to read the information recorded on said information recording medium;
• a detector for detecting electrons emitted from said information recording medium;
• and
• a defect calculating operation unit for reading the information recorded on said information recording medium from the electrons detected by said detector and judging as to whether or not an abnormal condition of said information recording medium is present.

An information recording medium examining method for examining an appearance of an information recording medium, comprising:

• irradiating an intended position of said information recording medium with an electron beam;
• detecting electrons having acquired information of a surface of said information recording medium by irradiating said information recording medium with the electron beam;
• acquiring an image of the surface of said information recording medium from said detected electrons;
• irradiating said information recording medium with the electron beam by a recording-purpose electron gun in order to record thereon information;
• and
• providing an irradiation position of said examining-purpose electron beam at a post position of said irradiation position of the recording-purpose electron beam by said recording-purpose electron gun.