Magnet assemblies
AssigneeAviza Technology, Inc.
InventorsGordon R Green, Robert K Trowell
Life of this patent
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Abstract
This invention relates to magnetic assemblies and, in particular, to assemblies which are useful for inducing magnetic fields within vacuum chambers. Thus a magnetic assembly, generally indicated at 10, includes the rectangular magnetically soft core 11 carrying windings 12, which together form the main planar electromagnet, generally indicated at 13, and immediately adjacent the edges of the magnet 13 are placed auxiliary coils 14. Coils 14 are each formed from windings 15 wound around oblate cores 16 and it would be noted that they project upwardly above the upper surface of the planar magnet 13. Pole pieces 17 are attached to the ends of the planar magnet 13 and these two project above the upper surface of the planar magnet 13. The assembly is completed by mounting brackets 18.
Claims11
A magnetic assembly comprising:
- an electromagnet which includes windings wound about a generally planar body, the generally planar body including opposite first and second side surfaces and opposite first and second principal planar surfaces extending between the opposite first and second side surfaces, wherein the windings cross over the opposite first and second principal surfaces and the opposite first and second side surfaces of the planar body;
- and
- a pair of auxiliary coils spaced from the electromagnet and lying in a same plane as the planar body of the electromagnet, wherein the pair of auxiliary coils are respectively disposed adjacent to and along the opposite side surfaces of the planar body of the electromagnet such that the planar body of the electromagnet is located between the pair of auxiliary coils, wherein a portion of each of the pair of auxiliary coils projects beyond the first principal planar surface of the electromagnet.
Planar workpiece processing apparatus comprising:
- a vacuum chamber;
- a support for a workpiece located in the chamber to support the workpiece in a generally planar workpiece location;
- and
- a magnetic assembly which includes an electromagnet and auxiliary coils which generate a uniform magnetic field extending between the auxiliary coils and parallel to a base of the generally planar workpiece support;
- wherein the electromagnet includes windings wound about a generally planar body located below the support, the electromagnet including a generally planer principal surface extending between opposite sides of the electromagnet;
- and
- wherein the auxiliary coils include a pair of auxiliary coils disposed adjacent the opposite sides of the electromagnet such that the electromagnet is located between the pair of auxiliary coils and such that the pair of auxiliary coils project above the principal surface of the electromagnet.
Dependencies are inferred from the claim text.