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US 7,403,028 B2Granted
Test structure and probe for differential signals
AssigneeCascade Microtech, Inc.
InventorRichard Campbell
Life of this patent
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Abstract
A test structure including a differential gain cell and a differential signal probe include compensation for the Miller effect reducing the frequency dependent variability of the input impedance of the test structure.
Claims3
A test structure for testing a functionality of a transistor, said test structure comprising:
- (a) a first transistor including:
- (i) a first terminal connectible through a first resistance to a source of a first component of a differential signal;
- (ii) a second terminal connectible through a second resistance to a sink for a first component of an output signal and interconnected to said first terminal by a parasitic capacitance;
- and
- (iii) a third terminal;
- (b) a second transistor including:
- (i) a first terminal connectible through a third resistance to a source of a second component of a differential signal;
- (ii) a second terminal connectible through a fourth resistance to a sink for a second component of an output signal and interconnected to said first terminal by a parasitic capacitance;
- and
- (iii) a third terminal interconnected with said third terminal of said first transistor and a source of a bias voltage;
- (c) a first compensating capacitor connecting said first terminal of said first transistor to said second terminal of said second transistor;
- and
- (d) a second compensating capacitor connecting said first terminal of said second transistor to said second terminal of said first transistor.
10 more elements
Dependencies are inferred from the claim text.