Back to results
US 7,402,849 B2Granted
Parallel, individually addressable probes for nanolithography
AssigneeThe Board of Trustees of the University of Illinois
InventorsChang Liu, Ming Zhang, David Andrew Bullen
Life of this patent
Estimating the term…
Abstract
A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.
Claims5
A dip pen nanolithography system comprising:
- a patterning compound;
- a probe chip;
- a plurality of actuated probes coupled to said probe chip and arranged in an array, said patterning compound being applied to each of said probes;
- each of said actuated probes comprising an individually selectable actuator for deflecting an individual probe.
1 more element
Dependencies are inferred from the claim text.