Electron injection in ion implanter magnets
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsAnthony Renau, Donna L. Smatlak, James Buff, Eric Hermanson
Life of this patent
Estimating the term…
Abstract
One or more electron sources are utilized to inject electrons into an ion beam being transported between the polepieces of a magnet. In some embodiments, the electron sources are located in cavities in one or both polepieces of the magnet. In other embodiments, a radio frequency or microwave plasma flood gun is located in a cavity in at least one of the polepieces or between the polepieces.
Claims24
A magnet assembly for operation with an ion beam, comprising:
- a magnet including spaced-apart first and second polepieces;
- a flight tube for transport of an ion beam between the first and second polepieces;
- and an electron source entirely embedded in a cavity in at least one of the first and second polepieces to inject electrons into the flight tube through a slot, the cavity in communication with the slot having an opening dimension into the flight tube less than a size of the cavity.
An ion implanter comprising:
- an ion source to generate an ion beam;
- a magnet including spaced-apart first and second polepieces;
- a flight tube for transport of the ion beam between the first and second polepieces;
- an electron source entirely embedded in a cavity in at least one of the first and second polepieces to inject electrons into the flight tube through a slot, the cavity in communication with the slot having an opening dimension into the flight tube less than a size of the cavity, and a target site downstream of the magnet to support a target for ion implantation, wherein the ion beam is transported through the flight tube to the target site.
An ion implanter as defined claim in 15, wherein the electron source comprises an elongated electron source having a long dimension orthogonal to the ion beam.
A method for transporting an ion beam through a magnet, comprising:
- transporting an ion beam between first and second polepieces of a magnet;
- and injecting electrons into the ion beam being transported between the first and second polepieces from an electron source entirely embedded in a cavity in at least one of the first and second polepieces of the magnet through a slot, the cavity in communication with the slot having an opening dimension into the flight tube less than a size of the cavity.
A magnet assembly for operation with an ion beam, comprising:
- a magnet including spaced-apart first and second polepieces;
- a flight tube for transport of an ion beam between the polepieces of the magnet;
- and a radio frequency or microwave plasma flood gun entirely embedded in a cavity in at least one of the first and second polepieces to inject electrons into the flight tube through a slot, the cavity in communication with the slot having an opening dimension into the flight tube less than a size of the cavity.
An ion implanter comprising:
- an ion source to generate an ion beam;
- a magnet including spaced-apart first and second polepieces;
- a flight tube for transport of the ion beam between the first and second polepieces;
- a radio frequency or microwave plasma flood gun entirely embedded in a cavity in at least one of the first and second polepieces to inject electrons into the flight tube through a slot, the cavity in communication with the slot having an opening dimension into the flight tube less than a size of the cavity;
- and a target site downstream of the magnet to support a target for ion implantation, wherein the ion beam is transported through the flight tube to the target site.
A method for transporting an ion beam through a magnet, comprising:
- transporting an ion beam between first and second polepieces of a magnet;
- and injecting electrons into the ion beam being transported between the first and second polepieces from a radio frequency or microwave plasma flood gun entirely embedded in a cavity in at least one of the first and second polepieces through a slot, the cavity in communication with the slot having an opening dimension into the flight tube less than a size of the cavity.
Dependencies are inferred from the claim text.