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US 7,402,810 B2Granted
X-ray detecting device and fabricating method thereof
AssigneeLG Display Co., Ltd.
InventorIk Soo Kim
Life of this patent
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Abstract
An X-ray detecting device, and a fabricating method thereof, that reduces ground line breakage. In the device and method, a storage electrode is formed along a ground line. Accordingly, a step between the storage electrode and the ground line is prevented, which reduces ground line breakage.
Claims14
An X-ray detecting device having X-ray detecting cells arranged at intersections between data lines and gate lines, said device comprising:
- a ground line that extends along a column direction, said ground line connected to a plurality of X-ray detecting cells so as to apply a ground voltage;
- a storage electrode connected to said ground line, said storage electrode electrically connected to said plurality of X-ray detecting cells;
- and a pixel electrode in each X-ray detecting cell of said plurality of X-ray detecting cells whererin said storage eletrodes of adjacent X-ray detecting cells along said column direction are connection to each other.
A method of fabricating an X-ray detecting device having X-ray detecting cells arranged at intersections between data lines and gate lines, the method comprising the steps of:
- forming a gate-insulating layer on a substrate and over the gate lines;
- forming a storage electrode connected to adjacent X-ray detecting cells along a column direction parallel to said data line;
- forming a ground line connected to the storage electrode so as to apply a ground voltage to the adjacent X-ray detecting cells;
- coating a storage insulating film on the gate insulating film;
- forming a storage electrode for preventing etching of the storage-insulating layer;
- forming a protective film on the storage insulating film;
- defining a contact hole in the protective film;
- and
- forming a pixel electrode connected, via the contact hole, to an electrode on the protective film,
- wherein said storage eletrodes of said adjacent X-ray detecting cells along said column direction are connected to each other.
7 more elements
Dependencies are inferred from the claim text.