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US 7,402,803 B1Granted
Pixel architecture for thermal imaging system
AssigneeRedshift Systems Corporation
InventorsMatthias Wagner, Shuyun Wu, Eugene Y. Ma
Life of this patent
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Abstract
A thermally tunable pixel element includes a substrate; a thermally tunable filter island; a thermal absorption structure in direct thermal contact with and extending beyond the thermally tunable filter island; and a thermal isolation structure providing a thermally isolating path between the thermal absorption structure and the substrate.
Claims16
A structure comprising:
- a substrate;
- a plurality of thermally tunable filter islands;
- a thermally isolating trench between each filter island of the plurality of filter islands;
- a thermal absorption structure in direct thermal contact with and extending beyond one of the thermally tunable filter islands;
- and
- a thermal isolation structure providing a thermally isolating path between the thermal absorption structure and the substrate.
3 more elements
Dependencies are inferred from the claim text.