Flexible scan field
AssigneeGSI Group Corporation
InventorsAnton Kitai, Jonathan S Ehrmann
Life of this patent
Estimating the term…
Abstract
An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values. The adjusting of the pupil size can be carried out automatically, semi-automatically, or manually. In manual modes, instructions can be presented to the operator (e.g., via a monitor or pre-programmed audio instruction) indicating how to adjust pupil size. A focus lens focuses the adjusted beam directed along each path at a different focal point within a scan field encompassed in the field of view of the focus lens. Beam directing optics are configured to enable multiple scan fields within the field of view of the focus lens.
Claims39
A method of flexibly optimized material processing comprising:
- receiving at least one material processing parameter relevant to impinging a work piece with a laser beam;
- issuing at least one optimized control signal corresponding to the at least one processing parameter to reduce degradation over the field of view based on the at least one material processing parameter;
- adjusting the laser beam to a first adjusted beam in accordance with the at least one optimized control signal;
- directing the adjusted laser beam to one or more targets within a first scan field;
- and
- focusing the directed beam onto the one or more targets within the first scan field wherein one said optimized control signal is an optimum scan field value corresponding to one of the group of values consisting of an effective pupil size of the beam directing optics, a focused laser beam spot size, a positional accuracy, a scanning speed, a material handling step size of a motion system, and a telecentricity value.
A material processing method comprising:
- emitting a laser beam;
- receiving input and issuing optimized control signals corresponding to the input;
- adjusting the emitted laser beam in accordance with at least one of the optimized control signals with beam expansion ratio adjusting optics;
- focusing the adjusted beam onto one or more targets within a scan field that is a selected area of a substrate and is encompassed by the field of view of a lens;
- and
- directing the adjusted beam with beam directing optics to at least one of the one or more targets within the scan field wherein at least one optimized control signal is optimized to reduce degradation over the field of view and wherein one said optimized control signal is an optimum scan field value corresponding to one of the group of values consisting of the effective pupil of the beam directing optics, a focused laser beam spot size, a positional accuracy, a scanning speed, a material handling step size of a motion system, and a telecentricity value.
A flexibly optimized material processing method comprising:
- emitting a laser beam;
- adjusting the emitted laser beam by adjusting the beam expansion ratio with beam adjusting optics having an adjustable beam expansion ratio;
- directing the adjusted beam with beam directing optics to one or more targets within a scan field corresponding to at least one selected area of a substrate, the beam directing optics providing a variable effective pupil corresponding to the adjusted laser beam;
- focusing the directed laser beam onto the one or more targets within the scan field using a lens having a field of view encompassing at least the scan field;
- and
- receiving input corresponding to a material processing parameter and issuing at least one optimized control signal corresponding to the input to reduce degradation over the field of view based on the at least one material processing parameter wherein one said optimized control signal is an optimum effective pupil size of the beam directing optics corresponding to a scan field dimension.
A laser material processing method for link blasting in a memory array comprising:
- emitting a laser beam;
- adjusting the emitted laser beam by adjusting the beam expansion ratio by setting a zoom telescope;
- directing the adjusted beam within a plurality of scan fields to one or more target links of a memory array using directing optics;
- focusing the directed laser beam onto the one or more target links of the memory array using a lens having a field of view encompassing the plurality of scan fields;
- receiving input corresponding to a packing density of links in a memory array and issuing at least one optimized signal based on the packing density, the at least one optimized signal corresponding to a scan field size and a selected spot size formed without degradation over the scan field;
- moving the memory array relative to the scan field at a controlled velocity to position at least one link within the scan field for blasting;
- and
- blasting the at least one link in the memory array with sufficient power to precisely remove the link in a controlled manner;
- wherein each scan field has a field size and an associated minimum spot size that is formed without degradation over each respective scan field, the minimum spot size increasing with each respective larger field size, and wherein degraded spots are formed beyond the respective scan field within the field of view of the lens, and wherein a zoom telescope setting corresponds to each minimum spot size.
Dependencies are inferred from the claim text.