Laser processing method and processing device

A laser processing apparatus, comprising:

• a holder configured to hold a processing target;
• a first laser source configured to emit a pulsed laser beam;
• a second laser source configured to emit a continuous-wave laser beam;
• an optical system configured to transmit the pulsed laser beam from the first laser source and the continuous-wave laser beam from the second laser source on a surface of the processing target held by the holder in such a manner that a beam spot of the pulsed laser beam is included inside a beam spot of the continuous-wave laser beam;
• and
• a moving mechanism configured to move at least one of the beam spots and the processing target relative to each other,
• wherein the moving mechanism is configured to move the processing target relative to the beam spots while the second laser source is emitting the continuous wave laser beam.