Strained silicon CMOS on hybrid crystal orientations

A method of fabricating a strained Si-containing hybrid substrate comprising:

• providing a hybrid substrate comprising a first semiconducting layer of a first crystallographic orientation, a buried insulating layer located on a surface of the first semiconductor layer and a second semiconducting layer of a second crystallographic orientation which is different from the first crystallographic orientation located on said buried insulating layer, wherein said providing the hybrid substrate includes a layer transfer technique and bonding and wherein both the first and second semiconductor layers is formed by a thermal mixing process performed in an oxygen-containing ambient at a temperature from about 900° to about 1350° C. which converts a sacrificial semiconductor layer and an overlaying SiGe alloy layer into a thermally mixed and relaxed SiGe alloy layer;
• forming a strained Si layer on said second semiconductor layer, said strained Si layer having the same crystallographic orientation as that of the second semiconductor layer;
• providing an opening the extends to a surface of the first semiconducting layer;
• forming spacers within said opening;
• and
• regrowing a semiconductor material on said first semiconducting layer in said opening, said regrown semiconductor material having the first crystallographic orientation.