Optimized transistor for imager device
AssigneeMicron Technology, Inc.
InventorHoward E. Rhodes
Life of this patent
Estimating the term…
Loading patent…
AssigneeMicron Technology, Inc.
InventorHoward E. Rhodes
Estimating the term…
An imager device that has mitigated dark current leakage and punch-through protection. The transistor associated with the photoconversion device is formed with a single (i.e, one-sided) active area extension region on one side of the transistor gate opposite the photoconversion device, while other transistors can have normal symmetrical (i.e, two-sided) active area extension regions (e.g., lightly doped drains) with resulting high performance and short gate lengths. The asymmetrical active area extension region of the transistor associated with the photodiode can serve to reduce dark current at the photoconversion device. The punch-through problem normally cured by a lightly doped drain is fixed at the transistor associated with the photoconversion device by adding a Vt adjustment implant and/or increasing its gate length.
A method of forming a pixel of an imager device, comprising:
A method of forming an array of pixels isolated from one another within and on a substrate, comprising:
A method of forming an imager pixel with mitigated dark current leakage, comprising:
A method of forming an imager pixel with mitigated leakage and dark current, comprising:
A method of forming an imager pixel with mitigated leakage and dark current, comprising forming a transfer transistor gate adjacent a photodiode at a first side of said transfer transistor gate, said transfer transistor gate having an associated single active area extension region at a second side of said transfer transistor gate opposite said first side, wherein said transfer transistor gate has an increased gate length relative to any other transistor gate of said imager pixel and said active area extension region is laterally spaced away from said transfer transistor gate.
A method of forming an imager pixel with mitigated leakage and dark current, comprising forming a transistor adjacent a photodiode at a first side of said transistor, said transistor having an active area and a single active area extension region at a second side of said transistor opposite said first side, where said active area and said active area extension region are laterally spaced away from a gate of said transistor by a portion of a substrate supporting said transistor.
Dependencies are inferred from the claim text.