Method of forming micro-structures and nano-structures
AssigneeWayne State University
InventorsDaniel G. Georgiev, Ivan Avrutsky, Ronald J. Baird, Golam Newaz, Gregory W. Auner
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Abstract
Methods of forming a nano-structure for electron extraction are disclosed. One method of forming a nano-structure comprises irradiating an area on a first surface of a thermal conductive film to melt the area across the film. The film is insulated on a second surface to provide two-dimensional heat transfer across the film. The liquid density of the film is greater than the solid density thereof. The method further comprises cooling the area inwardly from the periphery thereof to form a nano-structure having an apical nano-tip for electron extraction.
Claims26
A method of forming a nano-structure, the method comprising:
- irradiating an area on a first surface of a thermal conductive film to melt the area across the film, the film being insulated at a second surface thereof to provide two-dimensional heat transfer across the film, the liquid density of the film being greater than the solid density thereof;
- and
- cooling the area inwardly from the periphery thereof to form the nano-structure having an apical nano-tip.
A method forming a nano-structure, the method comprising:
- irradiating an area on a first surface of a thermal conductive film to melt the area across the film, the film being insulated at a second surface thereof to provide two-dimensional heat transfer across the film, the liquid density of the film being greater than the solid density thereof;
- and
- cooling the area inwardly from the periphery thereof to form the nano-structure having an apical nano-tip.
A method of forming micro-structures and nano-structures, the method comprising:
- irradiating an area on a thermal conductive film disposed on a substrate to melt the area across the film, the liquid density of the thermal conductive film being greater than the solid density thereof, the substrate configured to insulate the thermal conductive film for two-dimensional heat transfer across the film and having a low thermal conductivity relative to the film;
- and
- cooling the area inwardly from the periphery thereof to form a nano-jet having a conical nano-tip at the center for electron extraction.
Dependencies are inferred from the claim text.