Highly tetrahedral amorphous carbon coatings and systems and methods for their production

A coated article comprising:

• a glass substrate:
• a tetrahedral amorphous carbon layer supported with the glass substrate, the carbon layer having a density of at least about 2.4 gm/cm3 wherein the tetrahedral amorphous carbon layer includes sp2 and sp3 carbon-carbon bonds;
• wherein the tetrahedral amorphous carbon layer has more sp3 carbon-carbon bonds than sp2 carbon-carbon bonds;
• and wherein the sp3 carbon-carbon bonds are formed by subplantation.

A coated article comprising:

• a substrate:
• a diamond like coating (DLC) layer provided supported with the substrate, the diamond like coating including at least about 15% sp3 carbon-carbon bonds;
• an oxide layer supported with the substrate;
• and
• wherein the oxide layer is adjacent to the diamond like coating.

A coated article comprising:

• a glass substrate;
• a layer including nickel (Ni) atoms supported with the substrate;
• and
• a layer comprising hydrogenated amorphous diamond-like carbon (DLC) with tetrahedral amorphous carbon, the DLC layer supported with the substrate, the (DLC) layer including sp3 carbon-carbon bonds;
• and
• wherein the layer with Ni atoms is located between the glass substrate and the DLC layer.