Apparatus for optical beam shaping and associated methods
AssigneeASML Holding N.V.
InventorMatthew E. Hansen
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AssigneeASML Holding N.V.
InventorMatthew E. Hansen
Estimating the term…
This invention relates to an apparatus for optical beam shaping and diffusing, a method for making the apparatus, and a method for using the apparatus. The apparatus comprises a crystalline material object shaped to fit within an optical train and with a pattern of surface texture along an optical path. Surface removal processes are applied to a portion of a surface of an object made of a crystalline material to form a surface texture pattern at that portion of the surface of the object. The surface texture pattern depends upon: (1) the identity of the crystalline material and (2) the orientation of crystal lattice axes within the object with respect to the portion of the surface of the object where the pattern of surface texture is to be formed. Processes for making the apparatus include, but are not limited to, mechanical grinding, ablating, chemical etching, plasma etching, ion milling, and combinations thereof. The arrangement of the pattern of surface texture can be refined by coupling lithographic patterning methods with any of the surface removal processes. The apparatus can be used to change one or more of: (1) a shape, (2) an orientation, (3) an aspect ratio, (4) an angular pupil distribution, and (5) an intensity profile of a cross section of an optical beam.
An apparatus for optical beam shaping, comprising an object made of a single crystalline material having crystal lattice axes configured so that, when the object is rotated about an axis of the crystal lattice axes and an optical beam impinges a portion of a surface of the object, a first feature of a cross section of the optical beam changes while a second feature of the cross section of the optical beam is maintained, wherein the first feature is one of an angular orientation and an aspect ratio, the second feature is one of the angular orientation and the aspect ratio, and the second feature is different from the first feature.
An apparatus for optical beam shaping, comprising an object made of a single crystalline material having crystal lattice axes configured so that, when the object is rotated about a first axis of the crystal lattice axes and an optical beam impinges a portion of a surface of the object, a first feature of a cross section of the optical beam changes, and when the object is rotated about a second axis of the crystal lattice axes and the optical beam impinges the portion, a second feature of the cross section of the optical beam changes, wherein the first feature is one of an angular orientation and an aspect ratio, the second feature is one of the angular orientation and the aspect ratio, and the second feature is different from the first feature.
An apparatus for optical beam shaping, comprising an object, wherein a portion of a surface of the object includes a pattern of texture configured so that, when the object is rotated about a first axis and an optical beam impinges said portion, a first feature of a cross section of the optical beam changes, and when the object is rotated about a second axis and the optical beam impinges the portion, the second axis is different from the first axis, a second feature of the cross section of the optical beam changes, the first feature is one of an angular orientation and an aspect ratio, the second feature is one of the angular orientation and the aspect ratio, and the second feature is different from the first feature.
A method for making an apparatus for optical beam shaping, comprising the steps of:
A method for making an apparatus for optical beam shaping, comprising the steps of:
A method for making an apparatus for optical beam shaping, comprising the steps of:
Dependencies are inferred from the claim text.