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US 7,401,901 B2Granted
Inkjet printhead having nozzle plate supported by encapsulated photoresist
AssigneeSilverbrook Research Pty Ltd
InventorKia Silverbrook
Life of this patent
Estimating the term…
Abstract
An inkjet printhead is provided. The printhead comprises a plurality of nozzles formed on a substrate, and at least one nozzle plate spaced apart from the substrate. The nozzle plate is supported, at least partially, by encapsulated photoresist. Hence, the nozzle plate has improved robustness.
Claims16
An inkjet printhead comprising:
- a plurality of nozzles formed on a substrate;
- at least one nozzle plate spaced apart from the substrate;
- and
- a plurality of walls extending between the nozzle plate and the substrate, wherein the at least one nozzle plate is supported, at least partially, by photoresist encapsulated by at least said walls.
1 more element
A printhead integrated circuit, suitable for forming at least part of a pagewidth inkjet printhead, the printhead integrated circuit comprising:
- a plurality of nozzles formed on a substrate;
- at least one nozzle plate spaced apart from the substrate;
- and,
- a plurality of walls extending between the nozzle plate and the substrate
- wherein the at least one nozzle plate is supported, at least partially, by photoresist encapsulated by at least said walls,
- and wherein said wails and said nozzle plate are comprised of any one of the group comprising silicon nitride, silicon oxide and silicon oxynitride.
3 more elements
Dependencies are inferred from the claim text.