Droplet discharge apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Osamu Nakamura
Life of this patent
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Abstract
An object of the invention is to provide a droplet discharge apparatus which does not cause defective discharge due to drying, solidification, or the like of a composition in discharging the composition from a nozzle. One feature of the invention is to comprise a nozzle portion provided with a nozzle hole for discharging a composition, a piezo method for discharging the composition from the nozzle hole, a channel for supplying the composition to the bottom surface of the nozzle portion, wherein lyophilic treatment is performed on the bottom surface of the nozzle portion.
Claims23
A droplet discharge apparatus comprising:
- a nozzle portion including at least a nozzle hole for discharging a composition and a pressurizing means for discharging the composition from the nozzle hole;
- and
- a means for supplying the composition to a bottom surface of the nozzle portion,
- wherein a lyophilic treatment is performed on the bottom surface of the nozzle portion, and
- wherein the composition is exchanged between the nozzle hole and the means for supplying the composition.
A droplet discharge apparatus comprising:
- a nozzle portion including at least a plurality of nozzle holes for discharging a composition, and a pressurizing means for discharging the composition from the plurality of nozzle holes, wherein the nozzle portion is arranged in a linear shape;
- and
- a means for supplying the composition to a bottom surface of the nozzle portion,
- wherein a lyophilic treatment is performed on the bottom surface of the nozzle portion, and
- wherein the composition is exchanged between the plurality of nozzle holes and the means for supplying the composition.
A droplet discharge apparatus comprising:
- a nozzle portion including at least a nozzle hole for discharging a composition, a pressurizing means for discharging the composition from the nozzle hole, and a channel connected to a side wall of the nozzle hole,
- wherein the composition is exchanged between the nozzle hole and the channel.
A droplet discharge apparatus comprising:
- a nozzle portion including at least a nozzle hole for discharging a composition, a pressurizing means for discharging the composition from the nozzle hole, and first and second channels each connected to a side wall of the nozzle hole,
- wherein the composition is exchanged between the nozzle hole and at least one of the first and second channels.
A droplet discharge apparatus comprising:
- a nozzle portion including at least a plurality of nozzle holes for discharging a composition, a pressurizing means for discharging the composition from the plurality of nozzle holes, and a channel connected to a side wall of the plurality of nozzle holes, wherein the nozzle portion is arranged in a linear shape,
- wherein the channel connects the plurality of nozzle holes with each other, and the composition is exchanged between the plurality of nozzle holes and the channel.
A droplet discharge apparatus comprising:
- a nozzle hole for discharging a composition;
- a compression chamber connected to the nozzle hole;
- a channel connected to two different positions of a side wall of the compression chamber;
- a first pressurizing means provided on a side wall of the compression chamber;
- and
- a second pressurizing means provided on a side wall of the channel,
- wherein an on-off valve is provided in a connection portion between the compression chamber and the channel.
A droplet discharge apparatus comprising:
- a nozzle portion including at least a nozzle hole for discharging a composition and a pressurizing means for discharging the composition from the nozzle hole;
- a means for supplying the composition to a bottom surface of the nozzle portion;
- and
- a means for supplying vapor,
- wherein the means for supplying vapor supplies a vapor of a solvent of the composition to the droplet discharge apparatus.
A droplet discharge apparatus comprising:
- a droplet discharge means including at least a nozzle hole for discharging a composition, a compression chamber connected to the nozzle hole, a vibrating means, and a pressurizing means in contact with the compression chamber,
- wherein the pressurizing means and the vibrating means vibrate the composition included in the droplet discharge means.
A droplet discharge apparatus comprising:
- a nozzle portion including at least a nozzle hole for discharging a composition and a pressurizing means for discharging the composition from the nozzle hole;
- and
- a means for supplying the composition from a different direction in which the composition is discharged,
- wherein the composition is exchanged between the nozzle hole and the means for supplying the composition.
A droplet discharge apparatus comprising:
- a nozzle portion including at least a plurality of nozzle holes for discharging a composition, and a pressurizing means for discharging the composition from the plurality of nozzle holes, wherein the nozzle portion is arranged in a linear shape;
- and
- a means for supplying the composition from a different direction in which the composition is discharged,
- wherein the composition is exchanged between the plurality of nozzle holes and the means for supplying the composition.
Dependencies are inferred from the claim text.