Arrangement for transferring information/structures to wafers
AssigneeInfineon Technologies AG
InventorsJens Staecker, Uwe Bruch, Heiko Hommen
Life of this patent
Estimating the term…
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AssigneeInfineon Technologies AG
InventorsJens Staecker, Uwe Bruch, Heiko Hommen
Estimating the term…
An arrangement for transferring information/structures to wafers uses a stamp on which the information/structures to be transferred have been applied as elevated structures. The wafer is fixed on a chuck and is provided with a plastically deformable auxiliary patterning layer. In various implementations, the dimensions of the stamp approximately correspond to those of the wafer, the stamp is provided with the elevated structures essentially over the whole area, and/or the stamp and the wafer are in each case provided with mutually assigned pairs of alignment marks in such a way that the stamp can be positioned in a predetermined position on the wafer by means of an infrared positioning system and can be pressed into the plastically deformable auxiliary patterning layer.
An arrangement for use in transferring information/structures to wafers using a stamp, the arrangement comprising:
A method of manufacturing a semiconductor wafer, the method comprising:
Dependencies are inferred from the claim text.