Capacitive pressure sensor
AssigneeYamatake Corporation
InventorsYasuhide Yoshikawa, Yoshiyuki Ishikura, Toru Yamaguchi
Life of this patent
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Abstract
In a capacitance type pressure sensor (1) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion (101) formed in a region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion (102) formed in a region of the diaphragm having small sensitivity with respect to a pressure, there is provided the capacitance type pressure sensor which is entirely small in size and superior in reliability by independently detecting a signal output value of the reference capacitance detecting portion (102).
Claims4
A capacitance type pressure sensor comprising capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion which is formed in region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion which is formed in a region of the diaphragm having small sensitivity with respect to a pressure,
- wherein the pressure sensor is structured such that a signal output value of the reference capacitance detecting portion is detected independently of a signal for correction calculation and outputted as a pressure signal even in a region exceeding a measurement range of the regular pressure-sensitive capacitance detecting portion.
Dependencies are inferred from the claim text.