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US 7,401,523 B2Granted
Capacitive sensor and method of fabricating
AssigneeAnalog Devices, Inc.
InventorsPeter G. Meehan, Oliver Kierse
Life of this patent
Estimating the term…
Abstract
A capacitive sensor and a method of making it with a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap; a plurality of conductor elements interconnecting the substrate and fixed plate; and an edge lock supporting the fixed plate and the substrate relative to each other for maintaining the dimension of the defined gap independent of the conductor elements.
Claims48
A capacitive sensor comprising:
- a substrate having a diaphragm forming a first plate of a capacitor;
- a second fixed plate of the capacitor spaced from said diaphragm and defining a predetermined dielectric gap;
- a plurality of conductor elements interconnecting said substrate and fixed plate;
- and
- an edge lock supporting said fixed plate and said substrate relative to each other for maintaining the dimension of said defined gap independent of said conductor elements.
2 more elements
A method of fabricating a capacitive sensor comprising:
- providing a substrate having a diaphragm forming a first plate of a capacitor;
- providing a second fixed plate of the capacitor spaced from said diaphragm and defining a predetermined dielectric gap;
- interconnecting said substrate and fixed plate with a plurality of conductor elements;
- and
- supporting said fixed plate and said substrate relative to each other with an edge lock for maintaining the dimension of said defined gap independent of said conductor elements.
2 more elements
Dependencies are inferred from the claim text.