US 7,398,509 B2 · Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Abstract

A computer network for generating instructions for photomask manufacturing equipment, based on photomask specification data input by a customer. A series of order entry screens are downloaded to a remote customer's computer, typically via an internet connection. The customer is prompted to enter photomask specification data, which is delivered to computing equipment on the manufacturer's local network. The manufacturer's computing equipment validates the photomask specification data, and uses this data to generate fracturing instructions and equipment control instructions. The fracturing instructions, together with pattern design data from the customer, are delivered to a fracture engine, which provides fractured pattern data. The control instructions and the fractured pattern data may then be electronically delivered to the manufacturing equipment.

Claims24

Dependent claims

A system for generating photomask orders in a specified format comprising:

at least one form for entry of photomask order data;
at least one set of validation rules corresponding to the at least one form, the at least one set of validation rules including instructions operable to ensure that a user enters sufficient information into the at least one form in accordance with at least one of a specified photomask format and a specified dimensional criterion;
and
a graphical user interface associated with the at least one form, the graphical user interface operable to allow the user to access the at least one form to enter the photomask order data.

1 more element

Dependencies are inferred from the claim text.

Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Life of this patent

Network-based photomask data entry interface and instruction generator for manufacturing photomasks

Life of this patent

Abstract

Claims24