Method and system of providing a dynamic sampling plan for integrated metrology
AssigneeInternational Business Machines Corporation
InventorsGary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
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Abstract
A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
Claims8
A method comprising:
- modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system;
- receiving a request for a sampling plan;
- and
- sending a recommended sampling plan, based upon the request and the modeling.
A method for deploying an application for providing a dynamic sampling plan for integrated metrology, comprising:
- providing a computer infrastructure being operable to:
- model a sampling plan for use with a factory level advanced processing control (FL-APC) system;
- receive a request for a sampling plan;
- and
- send a recommended sampling plan, based upon the request and the modeling.
Dependencies are inferred from the claim text.