Systems and methods for facilitating wireless communication between various components of a distributed system
AssigneeEdwards Vacuum LLC
InventorsMichael Boger, Thomas Russell, Larry Marini
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AssigneeEdwards Vacuum LLC
InventorsMichael Boger, Thomas Russell, Larry Marini
Estimating the term…
The present invention provides systems and methods for facilitating communications between various components of distributed system. Specifically, the systems and methods of the present invention provide a wireless network for linking the various components of manufacturing equipment or manufacturing systems to one or more central control devices. Each component of the manufacturing equipment and the central control devices include a wireless module for handling communications between the components and the control devices. In some embodiments, one or more of the components may act as a server for other components in the network. In some embodiments, multiple data channels are used for communication between the components and the central control devices.
A system for facilitating communication between various components distributed within manufacturing equipment, said system comprising:
A system for facilitating communication between various components distributed within semiconductor manufacturing equipment, said system comprising:
Dependencies are inferred from the claim text.