Magnetic head coil system and damascene/reactive ion etching method for manufacturing the same

A magnetic head, comprising:

• an underlying layer, the underlying layer being electrically insulating;
• a photoresist layer positioned adjacent the underlying layer and having two opposing sides defining a channel with a plurality of turns, a bottom of the channel extending between the opposing sides being defined by the underlying layer;
• and
• a coil structure formed of a conductive material situated in the channel with a plurality of turns;
• wherein a profile of each of the sides of the photoresist layer that define the channel includes a first segment and a second segment that is contiguous with the first segment, the first segment defining a first angle relative to a plane of deposition of the photoresist layer, the second segment defining a second angle relative to the plane of deposition of the photoresist layer, the second angle being different than the first angle,
• wherein the first segment of each side of the photoresist layer is positioned below the second segment located contiguously thereto,
• wherein a height of the first segment of each side of the photoresist layer measured perpendicular to the plane of deposition of the photoresist layer extends from the underlying layer to a point between 20% and 80% of a total channel height from a top of the channel,
• wherein the first segment of each of the opposing sides of the photoresist layer taper together towards the underlying layer,
• wherein second segment defines an angle between 80 and 90 degrees relative to the plane of deposition of the photoresist layer,
• wherein the first segment defines an angle between 70 and 85 degrees relative to the plane of deposition of the photoresist layer.

A disk drive system, comprising:

• a magnetic recording disk;
• a magnetic head including:
• an insulating layer,
• a photoresist layer positioned adjacent the insulating layer, the photoresist layer having opposing sides defining at least one channel with a plurality of turns, and
• a coil structure defined by a conductive material situated in the channel with a plurality of turns,
• wherein each of the sides of the photoresist layer includes a first segment defining a first angle and a second segment defining a second angle, the first and second segments being contiguous;
• wherein a height of the first segment measured perpendicular to the plane of deposition of the photoresist layer extends from the insulating layer to a point between 20% and 80% of a total channel height from a top of the channel;
• wherein the photoresist layer does not overlay the coil structure,
• an actuator for moving the magnetic head across the magnetic recording disk so the magnetic head may access different regions of the magnetic recording disk;
• and
• a controller electrically coupled to the magnetic head.

A magnetic head, comprising:

• an insulating layer;
• a photoresist layer positioned adjacent the insulating layer for defining at least one channel with a plurality of turns;
• and
• a coil structure defined by a conductive material situated in the at least one channel with a plurality of turns, wherein the photoresist layer does not overlay the coil structure;
• wherein a profile of the channel includes a first segment defining a first angle relative to a plane of deposition of the photoresist layer, and a second segment continuous with the first segment, the second segment defining a second angle relative to a plane of deposition of the photoresist layer, the second angle being different than the first angle.