Deformable mirror
AssigneeOlympus Corporation
InventorsKenzi Murakami, Masahiro Nishio
Life of this patent
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Abstract
A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is formed on the deformable section, a drive electrode which is provided facing the GND electrode, and a driving-signal source which deforms the deformable section by an electric voltage applied between the GND electrode and the drive electrode. The deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and is provided with a capacitance detecting circuit which detects a change in response characteristics of the deformable section associated with a pressure change of a sealed-inside.
Claims8
A deformable mirror comprising:
- a deformable section on which, a reflecting surface is formed;
- a fixing section which fixes an outer periphery of the deformable section;
- a first electrode which is formed on the deformable section;
- a second electrode which is provided facing the first electrode;
- and
- a driving-signal source which deforms the deformable section by a voltage applied between the first electrode and the second electrode, wherein
- the deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and further comprising:
- a monitoring section which detects a change in response characteristics of the deformable section, associated with a pressure change in a sealed-inside.
A deformable mirror comprising:
- a deformable section on which, a reflecting surface is formed;
- a fixing section which fixes an outer periphery of the deformable section;
- a first electrode which is formed on the deformable section;
- a second electrode which is provided facing the first electrode;
- and
- a driving-signal source which deforms the deformable section by a voltage applied between the first electrode and the second electrode, wherein
- the deformable mirror is sealed such that a pressure inside lower than an atmospheric pressure, and further comprising;
- a pressure sensor which detects a pressure in a sealed-inside.
Dependencies are inferred from the claim text.